Sam Schmitz

Bistable Thin-Film Shape Memory Actuators for Applications in Tactile Displays

Bistable shape memory actuators were fabricated by microsystem technology processes and characterized with regard to their use in tactile graphic displays. The actuators were realized as sputter-deposited buckled metallic thin-film carriers, having structured Ti-Ni-Cu and Ti-Ni-Hf shape memory alloys on the top and at the bottom, respectively. They were sputtered on wavy-structured substrate and had lateral dimensions ranging from 2.2 to 3.5 mm in width and from 1 to 3 mm in length. The actuators were switched with voltages in the range of 0.2 to 0.8 V and with currents in the range of 0.2 to 0.8 A. A force of 2.2 mN with a displacement of 0.7 mm was reached. To improve the performance further, a special test setup was developed. The bistable actuators in it were sputtered on a planar substrate with lateral dimensions ranging from 6 to 8 mm in width and from 3 to 6 mm in length. These actuators were switched with actuation voltages in the range of 0.6 to 1.6 V and with currents in the range of 0.6 to 1.8 A. Thus, a force of 16 mN with a displacement of 1.2 mm was reached.

In-focus electron microscopy of frozen-hydrated biological samples with a Boersch phase plate

We report the implementation of an electrostatic Einzel lens (Boersch) phase plate in a prototype transmission electron microscope dedicated to aberration-corrected cryo-EM. The combination of phase plate, C(s) corrector and Diffraction Magnification Unit (DMU) as a new electron-optical element ensures minimal information loss due to obstruction by the phase plate and enables in-focus phase contrast imaging of large macromolecular assemblies. As no defocussing is necessary and the spherical aberration is corrected, maximal, non-oscillating phase contrast transfer can be achieved up to the information limit of the instrument. A microchip produced by a scalable micro-fabrication process has 10 phase plates, which are positioned in a conjugate, magnified diffraction plane generated by the DMU. Phase plates remained fully functional for weeks or months. The large distance between phase plate and the cryo sample permits the use of an effective anti-contaminator, resulting in ice contamination rates of <0.6 nm/h at the specimen. Maximal in-focus phase contrast was obtained by applying voltages between 80 and 700 mV to the phase plate electrode. The phase plate allows for in-focus imaging of biological objects with a signal-to-noise of 5-10 at a resolution of 2-3 nm, as demonstrated for frozen-hydrated virus particles and purple membrane at liquid-nitrogen temperature.

Practical aspects of Boersch phase contrast electron microscopy of biological specimens

Implementation of physical phase plates into transmission electron microscopes to achieve in-focus contrast for ice-embedded biological specimens poses several technological challenges. During the last decade several phase plates designs have been introduced and tested for electron cryo-microscopy (cryoEM), including thin film (Zernike) phase plates and electrostatic devices. Boersch phase plates (BPPs) are electrostatic einzel lenses shifting the phase of the unscattered beam by an arbitrary angle. Adjusting the phase shift to 90° achieves the maximum contrast transfer for phase objects such as biomolecules. Recently, we reported the implementation of a BPP into a dedicated phase contrast aberration-corrected electron microscope (PACEM) and demonstrated its use to generate in-focus contrast of frozen-hydrated specimens. However, a number of obstacles need to be overcome before BPPs can be used routinely, mostly related to the phase plate devices themselves. CryoEM with a physical phase plate is affected by electrostatic charging, obliteration of low spatial frequencies, and mechanical drift. Furthermore, BPPs introduce single sideband contrast (SSB), due to the obstruction of Friedel mates in the diffraction pattern. In this study we address the technical obstacles in detail and show how they may be overcome. We use X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) to identify contaminants responsible for electrostatic charging, which occurs with most phase plates. We demonstrate that obstruction of low-resolution features is significantly reduced by lowering the acceleration voltage of the microscope. Finally, we present computational approaches to correct BPP images for SSB contrast and to compensate for mechanical drift of the BPP.

μ-biomimetic flow-sensors—introducing light-guiding PDMS structures into MEMS

In the area of biomimetics, engineers use inspiration from natural systems to develop technical devices, such as sensors. One example is the lateral line system of fish. It is a mechanoreceptive system consisting of up to several thousand individual sensors called neuromasts, which enable fish to sense prey, predators, or conspecifics. So far, the small size and high sensitivity of the lateral line is unmatched by man-made sensor devices. Here, we describe an artificial lateral line system based on an optical detection principle. We developed artificial canal neuromasts using MEMS technology including thick film techniques. In this work, we describe the MEMS fabrication and characterize a sensor prototype. Our sensor consists of a silicon chip, a housing, and an electronic circuit. We demonstrate the functionality of our μ-biomimetic flow sensor by analyzing its response to constant water flow and flow fluctuations. Furthermore, we discuss the sensor robustness and sensitivity of our sensor and its suitability for industrial and medical applications. In sum, our sensor can be used for many tasks, e.g. for monitoring fluid flow in medical applications, for detecting leakages in tap water systems or for air and gas flow measurements. Finally, our flow sensor can even be used to improve current knowledge about the functional significance of the fish lateral line.

In situ generation of electrochemical gradients across pore-spanning membranes

Silicon substrates with cavities in the micrometre range were micro-fabricated and appropriately functionalized to allow for the generation of pore-spanning membranes (PSMs) sealing the pore cavities. PSMs were either formed by applying lipids dissolved in organic solvent (painting technique) on a hydrophobically functionalized silicon surface followed by ‘solvent freeze-out’, or solvent-free PSMs were prepared by spreading of giant unilamellar vesicles on hydrophilically functionalized substrates. The geometry of the silicon cavities in conjunction with three dimensional confocal laser scanning microscopy images enabled us to simultaneously monitor the PSMs and a pH-sensitive dye entrapped into the picolitre-sized cavities. The excellent sealing properties of both PSM types allowed an in situ generation of proton gradients across these membranes. In the presence of nigericin, a proton/potassium-antiporter, a preformed potassium ion gradient was transformed into a stable proton gradient across the PSMs, which was visualized by the pH-sensitive dye pyranine entrapped in the silicon cavities in a time resolved manner by means of confocal laser scanning fluorescence microscopy.

Towards an optimum design for electrostatic phase plates

Charging of physical phase plates is a problem that has prevented their routine use in transmission electron microscopy of weak-phase objects. In theory, electrostatic phase plates are superior to thin-film phase plates since they do not attenuate the scattered electron beam and allow freely adjustable phase shifts. Electrostatic phase plates consist of multiple layers of conductive and insulating materials, and are thus more prone to charging than thin-film phase plates, which typically consist of only one single layer of amorphous material. We have addressed the origins of charging of Boersch phase plates and show how it can be reduced. In particular, we have performed simulations and experiments to analyze the influence of the insulating Si3N4 layers and surface charges on electrostatic charging. To optimize the performance of electrostatic phase plates, it would be desirable to fabricate electrostatic phase plates, which (i) impart a homogeneous phase shift to the unscattered electrons, (ii) have a low cut-on frequency, (iii) expose as little material to the intense unscattered beam as possible, and (iv) can be additionally polished by a focused ion-beam instrument to eliminate carbon contamination accumulated during exposure to the unscattered electron beam (Walter et al., 2012, Ultramicroscopy, 116, 62-72). We propose a new type of electrostatic phase plate that meets the above requirements and would be superior to a Boersch phase plate. It consists of three free-standing coaxial rods converging in the center of an aperture (3-fold coaxial phase plate). Simulations and preliminary experiments with modified Boersch phase plates indicate that the fabrication of a 3-fold coaxial phase plate is feasible.

An uncooled capacitive sensor for IR detection

The beetle Melanophila acuminata detects forest fires from distances as far as 80 miles away. To accomplish this, the beetle uses highly specific IR receptors with a diameter of approximately 15 μm. These receptors are mechanoreceptors that detect deformations induced by the absorption of radiation. Although the detection mechanism is understood in principle, it is still unclear how the beetle reaches such high sensitivity. In this work, we present the biomimetic approach of an uncooled IR sensor based on the beetle’s receptors. This sensor is based on a fluid-filled pressure cell and operates at room temperature. Upon absorbing IR radiation, the fluid heats up and expands. The expanding fluid deflects one electrode of a plate capacitor. By measuring the change in capacitance, the volume increase and the absorbed energy can be inferred. To prevent the risk of damage at high energy absorption, a compensation mechanism is presented in this work. The mechanism prevents large but slow volume changes inside the pressure cell by a microfluidic connection of the pressure cell with a compensation chamber. The channel and the compensation chamber act as a microfluidic low-pass filter and do not affect the overall sensitivity above an appropriate cut-off frequency. Using MEMS technology, we are able to incorporate the complete system into a silicon chip with an area of a few mm2. Here, we show a proof-of-concept and first measurements of the sensor.

A model for mu-biomimetic thermal infrared sensors based on the infrared receptors of Melanophila acuminata

Beetles of the genus Melanophila acuminata detect forest fires from distances as far as 130 km with infrared-sensing organs. Inspired by this extremely sensitive biological device, we are developing an IR sensor that operates at ambient temperature using MEMS technology. The sensor consists of two liquid-filled chambers that are connected by a micro-fluidic system. Absorption of IR radiation by one of these chambers leads to heating and expansion of a liquid. The increasing pressure deflects a membrane covered by one electrode of a plate capacitor. The micro-fluidic system and the second chamber represent a fluidic low-pass filter, preventing slow, but large pressure changes. However, the strong frequency dependence of the filter demands a precise characterization of its properties. Here, we present a theoretical model that describes the frequency-dependent response of the sensor based on material properties and geometrical dimensions. Our model is divided into four distinct parts that address different aspects of the sensor. The model describes the frequency-dependent behaviour of the fluidic filter and a thermal low-pass filter as well as saturation effects at low frequencies. This model allows the calculation of optimal design parameters, and thereby provides the foundation for the development of such a sensor.

A μ-biomimetic uncooled infrared sensor

The beetle Melanophila acuminata detects forest fires from distances of about 80 miles. For the detection of fires, the beetle uses specialized infrared-sensing receptors. Inspired by this extremely sensitive natural device, we are developing an uncooled IR sensor. The beetle’s IR receptors are based on a fluid-filled pressure cell. By absorbing IR radiation, the fluid heats up and expands. The receptor senses the ensuing pressure increase using a mechanoreceptor. To discriminate between fast but small pressure signals, evoked by a distant heat source and slow but large background signals, due to changes in ambient temperature, the beetle has developed a sophisticated compensation mechanism. Our sensor will feature a size of a few mm2 and is fabricated using MEMS technology. The sensor uses the same mechanism as the beetle’s IR receptor, except for pressure sensing. The pressure increase inside the pressure cell deflects a membrane on top of which one electrode of a plate capacitor is located; this evokes changes in capacitance of a few fF (10−15 F). A long and narrow channel connects the pressure cell to a compensation chamber. To the outside, this chamber is sealed by a thin and elastic PDMS membrane. The channel enables the slow transfer of fluid to the compensation chamber while the thin membrane maintains the pressure inside this chamber close to the ambient pressure. Without this mechanism, the pressure inside the capacitor chamber would rise slowly due to ambient temperature changes and finally destroy the sensor.

SMA-thin film composites providing traveling waves

Actuators providign traveling waves are attractive for several industrial applications, like active skins for turbulent drag reduction or transport devices for assembling processes. Traveling waves require a flexible structure in contrast to standing waves which contain knots without vertical motion. Therefore, different concepts to realize these waves have been developed. This work presents the functional principle of wave generation by means of shape memory allow (SMA) thin film composites and the conditions that have to be considered for the performance of traveling waves with continuous wave flow. Devices using temperature inhomogeneities, an arrangement of separately addressed SMA composites as well as structures using different SMAs have been investigated and their feasibilty is discussed.