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Dive into the research topics where Sandra G. Malhotra is active.

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Featured researches published by Sandra G. Malhotra.


Journal of Applied Physics | 2002

Picosecond ultrasonics study of the vibrational modes of a nanostructure

G. Andrew Antonelli; Humphrey J. Maris; Sandra G. Malhotra; J. M. E. Harper

We report experiments in which a subpicosecond pump light pulse is used to excite vibrations in a nanostructure consisting of a periodic array of copper wires embedded in a glass matrix on a silicon substrate. The motion of the wires after excitation is detected using a time-delayed probe light pulse. From the measured data, it is possible to determine the frequencies νn and damping rates Γn of a number of the normal modes of the structure. These modes have frequencies lying in the range 1–30 GHz. By comparison of the measured νn and Γn with the frequencies and damping rates calculated from a computer simulation of the vibrations of the nanostructure, we have been able to deduce the vibration patterns of six of the normal modes.


Physica B-condensed Matter | 2002

A study of the vibrational modes of a nanostructure with picosecond ultrasonics

G. Andrew Antonelli; Humphrey J. Maris; Sandra G. Malhotra; J. M. E. Harper

Abstract We describe experiments in which a sub-picosecond pump light pulse is used to excite vibrations in a nanostructure. The sample consists of a periodic array of copper wires embedded in a glass matrix on a silicon substrate. The motion of the wires after excitation is detected using a time-delayed probe light pulse. From the data, it is possible to determine the frequencies ν n and damping rates Γ n of a number of the normal modes of the structure. These modes have frequencies lying in the range 1–30xa0GHz. By comparison of the measured ν n and Γ n with the frequencies and damping rates calculated from a computer simulation of the vibrations of the nanostructure, we have been able to identify the different normal modes and deduce their vibration patterns.


Archive | 1999

Dual etch stop/diffusion barrier for damascene interconnects

Daniel C. Edelstein; Timothy J. Dalton; John G. Gaudiello; Mahadevaiyer Krishnan; Sandra G. Malhotra; Maurice McGlashan-Powell; Eugene J. O'Sullivan; Carlos Juan Sambucetti


Archive | 2002

Copper recess process with application to selective capping and electroless plating

Shyng-Tsong Chen; Timothy J. Dalton; Kenneth M. Davis; Chao-Kun Hu; Fen F. Jamin; Steffen Kaldor; Mahadevaiyer Krishnan; Kaushik A. Kumar; Michael F. Lofaro; Sandra G. Malhotra; Chandrasekhar Narayan; David L. Rath; Judith M. Rubino; Katherine L. Saenger; Andrew H. Simon; Sean P. E. Smith; Wei-Tsu Tseng


Archive | 2000

Method of forming barrier layers for damascene interconnects

Daniel C. Edelstein; Timothy J. Dalton; John G. Gaudiello; Mahadevaiyer Krishnan; Sandra G. Malhotra; Maurice McGlashan-Powell; Eugene J. O'Sullivan; Carlos Juan Sambucetti


Archive | 2007

Method for increasing deposition rates of metal layers from metal-carbonyl precursors

Kenji Suzuki; Emmanuel Guidotti; Gerrit J. Leusink; F. R. McFeely; Sandra G. Malhotra


Archive | 2003

Multi-functional structure for enhanced chip manufacturibility & reliability for low k dielectrics semiconductors and a crackstop integrity screen and monitor

William F. Landers; Thomas M. Shaw; Diana Llera-Hurlburt; Scott W. Crowder; Vincent J. McGahay; Sandra G. Malhotra; Charles R. Davis; Ronald D. Goldblatt; Brett H. Engel


Archive | 2005

Method of depositing metal layers from metal-carbonyl precursors

Hideaki Yamasaki; Tsukasa Matsuda; Atsushi Gomi; Tatsuo Hatano; Masahito Sugiura; Yumiko Kawano; Gert J. Leusink; F. R. McFeely; Sandra G. Malhotra


Archive | 2002

Method for depositing a metal layer on a semiconductor interconnect structure

Sandra G. Malhotra; Andrew H. Simon


Archive | 2003

Low-pressure deposition of metal layers from metal-carbonyl precursors

Hideaki Yamasaki; Tsukasa Matsuda; Atsushi Gomi; Tatsuo Hatano; Masahito Sugiura; Yumiko Kawano; Gert J. Leusink; F. R. McFeely; Sandra G. Malhotra

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