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Dive into the research topics where Sang-Don Jang is active.

Publication


Featured researches published by Sang-Don Jang.


Archive | 2003

LCD glass cassette

Sang-Don Jang


Archive | 2009

Maskless lithographic apparatus and methods of compensation for rotational alignment error using the same

Jeongmin Kim; Sang-Woo Bae; Hi-Kuk Lee; Sang-Don Jang


Archive | 2009

Method of aligning an exposure apparatus, method of exposing a photoresist film using the same and exposure apparatus for performing the method of exposing a photoresist film

Sang-hyun Park; Sang-Don Jang; Dong-seok Baek; Ki-Hyun Kim; Sang-min Lee; Dong Min Kim


Measurement Science and Technology | 2014

Calibration of the straightness and orthogonality error of a laser feedback high-precision stage using self-calibration methods

Dongmin Kim; Ki-Hyun Kim; Sang Hyun Park; Sang-Don Jang


Archive | 2009

METHOD OF MEASURING POSITION ERROR OF BEAM OF EXPOSURE APPARATUS AND EXPOSURE APPARATUS USING THE SAME

Sang-hyun Park; Sang-Don Jang; Hi-Kuk Lee; Jeongmin Kim


Archive | 2016

Supporting unit and substrate treating apparatus including the same

Sang-hyun Park; Sang-Don Jang; In Bae Chang


Archive | 2015

MASKLESS EXPOSURE DEVICE AND METHOD FOR COMPENSATING CUMULATIVE ILLUMINATION USING THE SAME

Hi-Kuk Lee; Jae-Young Jang; Jae-hyuk Chang; Sang-Don Jang


Archive | 2013

STAGE DEVICE AND DRIVING METHOD THEREOF

Sang-Don Jang; Sang-Wook Park; Oui-Serg Kim; Hi-Kuk Lee; Inbae Chang


Journal of the Korean Society for Precision Engineering | 2010

Orthogonality Calibration of a High Precision Stage using Self-calibration Method

Ki-Hyun Kim; Sang-hyun Park; Dong Min Kim; Sang-Don Jang


Archive | 2015

STAGE DEVICE AND SEMICONDUCTOR FABRICATION APPARATUS INCLUDING THE SAME

Sang-Wook Park; Oui-Serg Kim; Sang-Don Jang

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Ki-Hyun Kim

Seoul National University

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Dongmin Kim

Korea Research Institute of Standards and Science

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