Sang Hyun Oh

Ultrasmooth patterned metals for plasmonics and metamaterials.

Perfectly Flat? Plasmonic devices, which exploit the interactions of light with surface electrons, show great promise for applications in sensing, communications, and energy conversion. A key hindrance is the deposition of patterned metals used for plasmonics, because, as deposited, the terminal surfaces are rough and not amenable to patterning by directional dry-etching techniques. Nagpal et al. (p. 594) use patterned silicon substrates on which they add gold, silver, or copper and then apply an epoxy layer to the deposited metal. When pulled apart, the metal separates from the silicon, where the adhesion is poorer, leaving an ultra-smooth surface. The resulting surface plasmon propagation lengths approach the theoretical values for perfectly flat films. Films with enhanced surface-plasmon propagation may find use in sensing and communications devices. Surface plasmons are electromagnetic waves that can exist at metal interfaces because of coupling between light and free electrons. Restricted to travel along the interface, these waves can be channeled, concentrated, or otherwise manipulated by surface patterning. However, because surface roughness and other inhomogeneities have so far limited surface-plasmon propagation in real plasmonic devices, simple high-throughput methods are needed to fabricate high-quality patterned metals. We combined template stripping with precisely patterned silicon substrates to obtain ultrasmooth pure metal films with grooves, bumps, pyramids, ridges, and holes. Measured surface-plasmon–propagation lengths on the resulting surfaces approach theoretical values for perfectly flat films. With the use of our method, we demonstrated structures that exhibit Raman scattering enhancements above 107 for sensing applications and multilayer films for optical metamaterials.

Recent progress in SERS biosensing

This perspective gives an overview of recent developments in surface-enhanced Raman scattering (SERS) for biosensing. We focus this review on SERS papers published in the last 10 years and to specific applications of detecting biological analytes. Both intrinsic and extrinsic SERS biosensing schemes have been employed to detect and identify small molecules, nucleic acids, lipids, peptides, and proteins, as well as for in vivo and cellular sensing. Current SERS substrate technologies along with a series of advancements in surface chemistry, sample preparation, intrinsic/extrinsic signal transduction schemes, and tip-enhanced Raman spectroscopy are discussed. The progress covered herein shows great promise for widespread adoption of SERS biosensing.

Engineering metallic nanostructures for plasmonics and nanophotonics

Metallic nanostructures now play an important role in many applications. In particular, for the emerging fields of plasmonics and nanophotonics, the ability to engineer metals on nanometric scales allows the development of new devices and the study of exciting physics. This review focuses on top-down nanofabrication techniques for engineering metallic nanostructures, along with computational and experimental characterization techniques. A variety of current and emerging applications are also covered.

Analytic description of short-channel effects in fully-depleted double-gate and cylindrical, surrounding-gate MOSFETs

Short-channel effects in fully-depleted double-gate (DG) and cylindrical, surrounding-gate (Cyl) MOSFETs are governed by the electrostatic potential as confined by the gates, and thus by the device dimensions. The simple but powerful evanescent-mode analysis shows that the length /spl lambda/, over which the source and drain perturb the channel potential, is 1//spl pi/ of the effective device thickness in the double-gate case, and 1/4.810 of the effective diameter in the cylindrical case, in excellent agreement with PADRE device simulations. Thus for equivalent silicon and gate oxide thicknesses, evanescent-mode analysis indicates that Cyl-MOSFETs can be scaled to 35% shorter channel lengths than DG-MOSFETs.

Vertically Oriented Sub-10-nm Plasmonic Nanogap Arrays

Nanometric gaps in noble metals can harness surface plasmons, collective excitations of the conduction electrons, for extreme subwavelength localization of electromagnetic energy. Positioning molecules within such metallic nanogaps dramatically enhances light-matter interactions, increasing absorption, emission, and, most notably, surface-enhanced Raman scattering (SERS). However, the lack of reproducible high-throughput fabrication techniques with nanometric control over the gap size has limited practical applications. Here we show sub-10-nm metallic nanogap arrays with precise control of the gaps size, position, shape, and orientation. The vertically oriented plasmonic nanogaps are formed between two metal structures by a sacrificial layer of ultrathin alumina grown using atomic layer deposition. We show increasing local SERS enhancements of up to 10(9) as the nanogap size decreases to 5 nm. Because these sub-10-nm gaps can be fabricated at high densities using conventional optical lithography over an entire wafer, these results will have significant implications for spectroscopy and nanophotonics.

Periodic nanohole arrays with shape-enhanced plasmon resonance as real-time biosensors

The authors report a combination of the enhanced transmission effect and shape resonances in a periodic array of nanoscale double-hole structures in a gold film to enhance the detection sensitivity of surface plasmon biosensors. Finite-difference time-domain calculations are used to quantify field enhancement at the apexes of the double-hole structure. The double-hole array was used to measure the formation of a self-assembled monolayer and for real-time sensing of protein adsorption onto a gold surface. This result demonstrates the potential to integrate propagating surface plasmons and localized shape resonances to improve real-time biosensors.

Plasmonic nanocavity arrays for enhanced efficiency in organic photovoltaic cells

Photovoltaic cells suffer an efficiency trade-off: thicker cells absorb more light, but the photo-generated excitons may recombine before dissociation, limiting the photo-current. With subwavelength confinement of the incident light, plasmonic nanocavities can overcome this limitation.

Template-stripped smooth Ag nanohole arrays with silica shells for surface plasmon resonance biosensing.

Inexpensive, reproducible, and high-throughput fabrication of nanometric apertures in metallic films can benefit many applications in plasmonics, sensing, spectroscopy, lithography, and imaging. Here we use template-stripping to pattern periodic nanohole arrays in optically thick, smooth Ag films with a silicon template made via nanoimprint lithography. Ag is a low-cost material with good optical properties, but it suffers from poor chemical stability and biocompatibility. However, a thin silica shell encapsulating our template-stripped Ag nanoholes facilitates biosensing applications by protecting the Ag from oxidation as well as providing a robust surface that can be readily modified with a variety of biomolecules using well-established silane chemistry. The thickness of the conformal silica shell can be precisely tuned by atomic layer deposition, and a 15 nm thick silica shell can effectively prevent fluorophore quenching. The Ag nanohole arrays with silica shells can also be bonded to polydimethylsiloxane (PDMS) microfluidic channels for fluorescence imaging, formation of supported lipid bilayers, and real-time, label-free SPR sensing. Additionally, the smooth surfaces of the template-stripped Ag films enhance refractive index sensitivity compared with as-deposited, rough Ag films. Because nearly centimeter-sized nanohole arrays can be produced inexpensively without using any additional lithography, etching, or lift-off, this method can facilitate widespread applications of metallic nanohole arrays for plasmonics and biosensing.

Three-dimensional plasmonic nanofocusing

We demonstrate three-dimensional plasmonic nanofocusing of light with patterned metallic pyramids obtained via template stripping. Gratings on the faces of these pyramids convert linearly polarized light into plasmons that propagate toward and converge at a approximately 10 nm apex. Experiments and computer simulations confirm that optical energy is focused into a nanoscale volume (5 x 10(-5) wavelength(3)). Because these structures are easily and reproducibly fabricated, our results could benefit many applications, including imaging, sensing, lithography, and nonlinear spectroscopy.

Atomic layer lithography of wafer-scale nanogap arrays for extreme confinement of electromagnetic waves

Squeezing light through nanometre-wide gaps in metals can lead to extreme field enhancements, nonlocal electromagnetic effects and light-induced electron tunnelling. This intriguing regime, however, has not been readily accessible to experimentalists because of the lack of reliable technology to fabricate uniform nanogaps with atomic-scale resolution and high throughput. Here we introduce a new patterning technology based on atomic layer deposition and simple adhesive-tape-based planarization. Using this method, we create vertically oriented gaps in opaque metal films along the entire contour of a millimetre-sized pattern, with gap widths as narrow as 9.9 Å, and pack 150,000 such devices on a 4-inch wafer. Electromagnetic waves pass exclusively through the nanogaps, enabling background-free transmission measurements. We observe resonant transmission of near-infrared waves through 1.1-nm-wide gaps (λ/1,295) and measure an effective refractive index of 17.8. We also observe resonant transmission of millimetre waves through 1.1-nm-wide gaps (λ/4,000,000) and infer an unprecedented field enhancement factor of 25,000.