Sang-Nam Kim

Electron Mean Energy in CF 4 , CH 4 , Ar mixtures

Energy Distribution Function in pure , and mixtures of and Ar, have been analyzed over a range of the reduced electric field strength between 0.1 and 350[Td] by the two-term approximation of the Boltzmann equation (BEq.) method and the Monte Carlo simulation (MCS). The calculations of electron swarm parameters require the knowledge of several collision cross-sections of electron beam. Thus, published momentum transfer, ionization, vibration, attachment, electronic excitation, and dissociation cross-sections of electrons for , and Ar, were used. The differences of the transport coefficients of electrons in , mixtures of and Ar, have been explained by the deduced energy distribution functions for electrons and the complete collision cross-sections for electrons. The results of the Boltzmann equation and the Monte Carlo simulation have been compared with the data presented by several workers. The deduced transport coefficients for electrons agree reasonably well with the experimental and simulation data obtained by Nakamura and Hayashi. The energy distribution function of electrons in -Ar mixtures shows the Maxwellian distribution for energy. That is, has the symmetrical shape whose axis of symmetry is a most probably energy.

Electron Energy Distribution Function in SF 6 -He Gas by Simulation

This paper describes the electron transport characteristics in -He gas calculated E/N values 0.1~700[Td] by the Monte Carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters obtained by TOF method. This study gained the values of the electron swarm parameters such as the electron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients for -He gas at a range of E/N. A set of electron collision cross section has been assembled and used in Monte Carlo simulation to predict values of swarm parameters. The result of Boltzmann equation and Monte Carlo Simulation has been compared with experimental data by Ohmori, Lucas and Carter. The swarm parameter from the swarm study are expected to sever as a critical test of current theories of low energy scattering by atoms and molecules.

Ionization and Diffusion Coefficients in CH 4 Gas by Simulation

Abstract - This paper describes the information for quantitative simulation of weakly ionized plasma. We must grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. Using quantitative simulations of weakly ionized plasma, we can analyze gas characteristic. In this paper, the electron Ionization and diffusion Coefficients in CH 4 has been analysed over the E/N range 0.1～300[Td], at the 300[°K] by the two term approximation Boltzmann equation method and Monte Carlo Simulation. Boltzmann equation method has also been used to predict swarm parameter using the same cross sections as input. The behavior of electron has been calculated to give swarm parameter for the electron energy distribution function has been analysed in CH 4 at E/N=10, 100 for a case of the equilibrium region in the mean energy. A set of electron collision cross section has been assembled and used in Monte Carlo simulation to predict values of swarm parameters. The result of Boltzmann equation and Monte Carlo Simulation has been compared with experimental data by Ohmori, Lucas and Carter. The swarm parameter from the swarm study are expected to sever as a critical test of current theories of low energy scattering by atoms and molecules. Key Words : Monte Carlo simulation(MCS), Boltzmann equation(BEq), Ionization Coefficients, Diffusion coefficients†교신저자 : 인천대학교 전기공학과 교수․공박E-mail : sn7332@incheon.ac.kr접수일자 : 2014년 11월 13일수정일자 : 2014년 11월 21일최종완료 : 2014년 11월 25일

Electron Energy Distribution function in CH 4 by MCS-BEq

This paper describes the information for quantitative simulation of weakly ionized plasma. We must grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. Using quantitative simulations of weakly ionized plasma, we can analyze gas characteristic. In this paper, the electron transport characteristic in has been analysed over the E/N range 0.1~300[Td], at the 300[] by the two term approximation Boltzmann equation method and Monte Carlo Simulation. Boltzmann equation method has also been used to predict swarm parameter using the same cross sections as input. The behavior of electron has been calculated to give swarm parameter for the electron energy distribution function has been analysed in at E/N

Ionization and Attachment Coefficients in CF4, CH4, Ar Mixtures Gas

Abstract - Ionization and Attachment Coefficients in pure CH 4 , CF 4 and mixtures of CF 4 and Ar, have been analyzed over a range of the reduced electric field strength between 0.1 and 350[Td] by the two-term approximation of the Boltzmann equation (BEq.) method and the Monte Carlo simulation (MCS). The calculations of electron swarm parameters require the knowledge of several collision cross-sections of electron beam. Thus, published momentum transfer, ionization, vibration, attachment, electronic excitation, and dissociation cross-sections of electrons for CH 4 , CF 4 and Ar, were used. The results of the Boltzmann equation and the Monte Carlo simulation have been compared with the data presented by several workers. The deduced transport coefficients for electrons agree reasonably well with the experimental and simulation data obtained by Nakamura and Hayashi. The energy distribution function of electrons in CF 4 -Ar mixtures shows the Maxwellian distribution for energy. That is, f(e) has the symmetrical shape whose axis of symmetry is a most probably energy. The proposed theoretical simulation techniques in this work will be useful to predict the fundamental process of charged particles and the breakdown properties of gas mixtures.Key Words : Drift velocities, Monte Carlo simulation(MCS), Boltzmann equation(BEq) †교신저자, 시니어회원 : 인천대학교 전기공학과 교수․공박E-mail : sn7332@incheon.ac.kr접수일자 : 2011년 12월 23일최종완료 : 2012년 2월 20일

The Drift Velocity of Electrons in CF 4 , CH 4 , Ar Mixtures Gas

Drift Velocity of Electrons in pure , and mixtures of and Ar. Have been analyzed over a range of the reduced electric field strength between 0.1 and 350[Td] by the two-term approximation of the Boltzmann equation (BEq.) method and the Monte Carlo simulation (MCS). The results of the Boltzmann equation and the Monte Carlo simulation have been compared with the data presented by several workers. The deduced transport coefficients for electrons agree reasonably well with the experimental and simulation data obtained by Nakamura and Hayashi. The energy distribution function of electrons in -Ar mixtures shows the Maxwellian distribution for energy. That is, f() has the symmetrical shape whose axis of symmetry is a most probably energy. The measured results and the calculated results have been compared each other.

Ionization and Attachment Coefficients in CF4

Abstract - In this paper, the electron transport characteristics in CF 4 has been analysed over the E/N range 1～300[Td] by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, longitudinal diffusion coefficient, the ratio of the diffusion coefficient to the mobility, electron ionization and attachment coefficients, effective ionization coefficient, mean energy, collision frequency and the electron energy distribution function.The electron energy distribution function has been analysed in CF 4 at E/N=5, 10, 100, 200 and 300[Td] for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results of Boltzmann equation and Monte Carlo simulation have been compared with experimental data by Y. Nakamura and M. Hayashi.The swarm parameter from the swarm study are expected to serve as a critical test of current theories of low energy electron scattering by atoms and molecules, in particular, as well as crucial information for quantitative simulations of weakly ionized plasmas. Key Words : Attachment Coefficients, Boltzmann Equation(BEq), Drift Velocities, Distribution Function, Ionization Coefficients,Monte Carlo Simulation(MCS)