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Sasaki Kazuo

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Publication

Featured researches published by Sasaki Kazuo.

Archive | 2014

Inductive coupled plasma processing apparatus

Sasaki Kazuo; Satoyoshi Tsutomu; Yamazawa Yohei; Furuya Atsuki; Saito Hitoshi

Archive | 2010

Vacuum processing apparatus, vacuum processing system and processing method

Minami Masato; Sasaki Yoshihiko; Sasaki Kazuo

Archive | 2017

Substrate mounting table and substrate processing apparatus

Sasaki Yoshihiko; Minami Masato; Sasaki Kazuo

Archive | 2016

Electronic equipment and manufacturing method thereof and manufacturing device thereof

Satoyoshi Tsutomu; Ishida Hiroshi; Sasaki Kazuo; Furuta Mamoru

Archive | 2016

Electronic component, manufacturing method and manufacturing apparatus thereof

Satoyoshi Tsutomu; Ishida Hiroshi; Sasaki Kazuo; Furuta Mamoru

Archive | 2016

ELECTRONIC DEVICE, METHOD FOR MANUFACTURING THE SAME, AND DEVICE FOR MANUFACTURING THE SAME

Satoyoshi Tsutomu; Ishida Hiroshi; Sasaki Kazuo; Furuta Mamoru

Archive | 2016

ELECTRONIC DEVICE, MANUFACTURING METHOD THEREOF, MANUFACTURING APPARATUS THEREOF

Satoyoshi Tsutomu; Ishida Hiroshi; Sasaki Kazuo; Furuta Mamoru

Archive | 2015

PLASMA PROCESSING APPARATUS, AND PLASMA DISTRIBUTION CONTROL METHOD

Sasaki Kazuo; Saito Hitoshi; Yamazawa Yohei; Furuya Atsuki; Naito Hiroshi

Archive | 2015

Plasma processing device and plasma distribution adjusting method

Sasaki Kazuo; Saito Hitoshi; Yamazawa Yohei; Furuya Atsuki; Naito Hajime

Archive | 2015

Plasma processing apparatus and plasma distribution adjustment method

Sasaki Kazuo; Saito Hitoshi; Yamazawa Hinata; Furuya Atsumura; Naito Hajime

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