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Sasaki Yoshihiko

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Publication

Featured researches published by Sasaki Yoshihiko.

Archive | 2008

Substrate carrying bench and substrate treatment device

Minami Masato; Sasaki Yoshihiko

Archive | 2009

Focus ring and plasma processing apparatus

Minami Masato; Sasaki Yoshihiko

Archive | 2008

Electrostatic sucking electrode, substrate processing apparatus and manufacturing method for electrostatic sucking electrode

Sasaki Yoshihiko; Minami Masato

Archive | 2008

Carrying bench and plasma treating device using the same

Sasaki Yoshihiko; Minami Masato

Archive | 2010

Electrode for electrostatic attraction, manufacturing method therefor and substrate processing apparatus

Sasaki Yoshihiko; Minami Masato; Furuya Atsuki

Archive | 2013

Ring-shaped shield member, component thereof, and substrate placement stage equipped with ring-shaped shield member

Sasaki Yoshihiko; Minami Masahito

Archive | 2012

Shield member, components thereof and substrate mounting table comprising shield member

Sasaki Yoshihiko; Minami Masato

Archive | 2012

SHIELD MEMBER, COMPONENT THEREOF, AND SUBSTRATE MOUNTING STAND EQUIPPED WITH SHIEL MEMBER

Sasaki Yoshihiko; Minami Masahito

Archive | 2011

ELECTROSTATIC CHUCK, METHOD OF MANUFACTURING THE SAME, AND SUBSTRATE PROCESSING APPARATUS

Sasaki Yoshihiko; Minami Masahito; Furuya Atsuki

Archive | 2010

Vacuum processing apparatus, vacuum processing system and processing method

Minami Masato; Sasaki Yoshihiko; Sasaki Kazuo

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