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Dive into the research topics where Satoru Iizuka is active.

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Featured researches published by Satoru Iizuka.


Kakuyūgō kenkyū | 1984

A new plasma source "plasma emitter"

Koichi Saeki; Satoru Iizuka; Noriyoshi Sato; Yoshisuke Hatta

A new plasma source, the plasma emitter, was successfully developed by synthesizing alkali metal ions and electrons emitted from a heated mixture of aluminosilicate and barium oxide. The plasma density is in the range of 107-108 cm-3 and the electron and ion temperatures are approximately equal to the emitter temperature around 1300 K. Being very simple in its construction and operation, the plasma emitter has been widely applied for various types of plasma experiments.


Archive | 2000

Plasma generating apparatus and semiconductor manufacturing method

Yunlong Li; Masanobu Sato; Yoshio Tominaga; Noriyoshi Sato; Satoru Iizuka


Archive | 1999

Method and apparatus for processing fine particle dust in plasma

Noriyoshi Sato; Satoru Iizuka; Giichiro Uchida


Archive | 1999

PLASMA PRODUCTION DEVICE

Satoru Iizuka; Unryu Ri; Noriyoshi Sato; 徳芳 佐藤; 雲龍 李; 哲 飯塚


プラズマ・核融合学会年会予稿集 | 2002

26pA04 Structure of fine-particle cloud in a plasma under microgravity condition

Satoru Iizuka; Wataru Suzukawa; Gouki Nishimura; Shinya Shimizu; Giichiro Uchida; Noriyoshi Sato


Archive | 2001

ECR Plasma Production by a Multi-Slotted Antenna Applied to Rectangular Substrates

Akira Sugiyama; Takamitsu Tadera; Tatsushi Yamamoto; Satoru Iizuka; Noriyoshi Sato


Archive | 2000

Analysis of Initial Deposition on Wall Surface During In-situ Chamber Wall Cleaning

Kouichiro Horiuchi; Satoru Iizuka; Noriyoshi Sato


Archive | 2000

Electron-Temperature Control for High-Quality Diamond Formation in a Low-Pressure RF Plasma

Tetsuji Shimizu; Satoru Iizuka; Noriyoshi Sato


Meeting abstracts of the Physical Society of Japan | 2000

Fine-Particle Flow Generated in a Plasma.

Giichiro Uchida; Satoru Iizuka; Tetsuo Kamimura; Noriyoshi Sato


Archive | 1999

Electron Temparature Control in an MMT RF Plasma

Tetsuji Shimizu; Y. F. Li; Kohgi Kato; Satoru Iizuka; Noriyoshi Sato

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