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Satoru Narizuka

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Publication

Featured researches published by Satoru Narizuka.

Archive | 2008

Compound for Photoacid Generator, Resist Composition Using the Same, and Pattern-Forming Method

Yuji Hagiwara; Jonathan Joachim Jodry; Satoru Narizuka; Kazuhiko Maeda

Archive | 2008

Fluorine-containing compound, fluorine-containing polymer, negative-type resist composition, and patterning process using same

Yoshimi Isono; Jonathan Joachim Jodry; Satoru Narizuka; Kazuhiro Yamanaka

Archive | 2009

Fluorine-Containing Sulfonates Having Polymerizable Anions and Manufacturing Method Therefor, Fluorine-Containing Resins, Resist Compositions, and Pattern-Forming Method Using Same

Takashi Masubuchi; Kazunori Mori; Yuji Hagiwara; Satoru Narizuka; Kazuhiko Maeda

Archive | 2008

Novel Sulfonic Acid Salt and Derivative Thereof, Photoacid Generator Agent, and Resist Material and Pattern Formation Method Using the Photoacid Generator Agent

Kazuhiko Maeda; Yoshimi Isono; Satoru Narizuka

Archive | 2005

Fluorine-Containing Polymerizable Monomer and Polymer Compound Using Same

Hiroshi Saegusa; Satoru Narizuka; Kazuhiko Maeda

Archive | 2009

Novel Sulfonic Acid Salt and Derivative thereof, Photo-Acid Generator, and Process for Production of Sulfonic Acid Salt

Masashi Nagamori; Masaki Fujiwara; Kazunori Mori; Satoru Narizuka

Archive | 2009

Fluorine-Containing Compound, Fluorine-Containing Polymer Compound, Resist Composition and Patterning Method Using Same

Kazunori Mori; Yuji Hagiwara; Yoshimi Isono; Satoru Narizuka; Kazuhiko 前田 一彦 Maeda

Archive | 2009

Method for producing alkoxycarbonylfluoroalkanesulfonic acid salt

Yuji Hagiwara; Ryozo Takihana; Masanori Fushimi; Yoshimi Isono; Satoru Narizuka

Archive | 2005

3-formyl-5-trifluoromethylbenzonitrile derivative and process for producing the same

Hiroshi Saegusa; Satoru Narizuka

Archive | 2008

２－ブロモ－２，２－ジフルオロエタノール及び２－（アルキルカルボニルオキシ）－１，１－ジフルオロエタンスルホン酸塩類の製造方法

Jonathan Joachim Jodry; Masashi Nagamori; Yuji Hagiwara; Masaki Fujiwara; Satoru Narizuka

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Collaboration

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Kazuhiko Maeda

IBM

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Kazuhiro Yamanaka

Georgia Institute of Technology

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