Is this you? Create Your Porfile
Avatar

Satoshi Shimatani

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Satoshi Shimatani is active.

Explore More

Publication

Featured researches published by Satoshi Shimatani.

Archive | 2004

Chemically amplified positive photo resist composition and method for forming resist pattern

Yusuke Nakagawa; Shinichi Hidesaka; Kenji Maruyama; Satoshi Shimatani; Masahiro Masujima; Kazuyuki Nitta

Archive | 2001

Positive-working photoresist composition and resist patterning method using same

Kazuyuki Nitta; Kazufumi Sato; Daisuke Kawana; Satoshi Shimatani

Archive | 2002

Positive resist composition of chemical amplification type, resist coated material, method of forming resist pattern, and process for producing semiconductor device

Kazuyuki Nitta; Takeyoshi Mimura; Satoshi Shimatani; Waki Okubo; Tatsuya Matsumi

Archive | 2002

Method for forming fine resist pattern

Kazuyuki Nitta; Satoshi Shimatani; Masahiro Masujima

Archive | 2001

Method for forming a hole-patterned photoresist layer

Kazuyuki Nitta; Satoshi Shimatani; Kazufumi Sato

Archive | 2007

CHEMICAL AMPLIFICATION TYPE POSITIVE PHOTORESIST COMPOSITION AND RESIST PATTERN FORMING METHOD

Kenji Maruyama; Masaki Kurihara; Ken Miyagi; Satoshi Niikura; Satoshi Shimatani; Masahiro Masujima; Kazuyuki Nitta; Toshihiro Yamaguchi; Kousuke Doi

Archive | 2005

Positive photoresist composition and resist pattern forming method

Masahiro Masujima; Kazuyuki Nitta; Satoshi Shimatani; 正宏 増島; 聡 嶋谷; 和行 新田

Archive | 2005

Chemical amplification type positive resist composition, resist laminated material, resist pattern forming method and method of manufacturing semiconductor device

Kazuyuki Nitta; Takeyoshi Mimura; Satoshi Shimatani; Waki Okubo; Tatsuya Matsumi

Archive | 2004

POSITIVE PHOTORESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN BY USING THE SAME

Kazuyuki Nitta; Kazuyoshi Okubo; Satoshi Shimatani; 和喜 大久保; 聡 嶋谷; 和行 新田

Archive | 2005

Positiv-Photoresist-Zusammensetzung vom chemisch verstärkten Typ und Methode zur Bildung eines Resistmusters

Kenji Maruyama; Masaki Kurihara; Ken Miyagi; Satoshi Niikura; Satoshi Shimatani; Masahiro Masujima; Kazuyuki Nitta; Toshihiro Yamaguchi; Kousuke Doi

Explore More

Collaboration

Dive into the Satoshi Shimatani's collaboration.

Top Co-Authors
Avatar

Kazufumi Sato

Osaka University

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge