Sei Moriyasu

Fabrication of a Hemi-Paraboloidal Solid Immersion Mirror and Designing of an Optical Head with the Mirror

A hemi-paraboloidal solid immersion mirror (HP-SIM) was for the first time fabricated with the electrolytic in-process dressing (ELID) grinding technology. By improving the surface deviation and roughness of the HP-SIM to the order of ±0.3 µm and 4 nm, the spot size (FWHM) of 0.22×0.26 µm was obtained in the blue light concentration with the HP-SIM though fairly large side lobes were observed. A small-sized optical head was also designed with the HP-SIM, a pair of collimating lenses, and laser diode, which height can be reduced to 1 mm. Diffraction limited concentration is expected with the HP-SIM optical head, though the accuracy of less than ±1 µm is required for the alignment of the LD to the collimating lenses for both X and Y directions.

Development of Small Tool by Micro Fabrication System Applying Elid Grinding Technique

In this study, we attempted to develop a cylindrical grinding machine applying the ELID technique, for use as a microtool. We also carried out a detailed investigation on the performance of the electrode turning method of the ELID system; a microcylindrical shaft and microangular shaft were ground using the cylindrical grinding machine applying ELID technique. Good dimensional accuracy was achieved.

Development of on-machine Profile Measuring System With Contact-type Probe

To achieve both high precision machining and high efficiency machining, the on-machine measurement system is inevitable. But conventionally there are no desirable sensors for on-machine profile measurement in the point of measurement accuracy and size. Authors have developed an ultraprecision profile measurement probe for on-machine measurement, which has three key technologies: laser interferometric displacement sensor and ultra-low pressure air-slide are inside and real-time measurement is possible by transmitting the current position data directly from the machine scales to the PC simultaneously together with the displacement data from the probe. The newly developed probe has high linearity, repeatability and traceability.

A Study of the Fabrication of Multi-Layer Microstructures Using ELID Grinding and the Thick Photoresist Lithography Technology

To make three-dimensional microstructures of SU-8 and the electroplated nickel by multi-layers, a good surface performance is required. In addition, the removal process of SU8 is necessary for making independent microstructures of nickel. In this report, we propose to apply the rotary in-feed ELID grinding method to this application in order to reduce the production cost to the level practical for commercial uses. This paper also describes the results in removing SU-8 without damages in the nickel structure.

Grinding Characteristics of Solid Immersion Mirrors with the ELID Grinding Method

This study describes the grinding of solid immersion mirrors wi th paraboroidal surfaces using a four-axis ultrahigh precision machine tool with an ELID s ystem and a contact probe for on-machine measurement. Results of the grinding experiments indica ted that good form accuracy was achieved successfully. Introduction The near field optical recording technologies using a solid immersi on lens (SIL as shown in Fig. 1 [1]) or solid immersion mirror (SIM as shown in Fig. 2 [2]) have b en proposed as promising candidates to overcome the density limit of conventional optical recordings with far field optics. Scanning type Beam Laser / Detector SIL Collimator Lens Mirror Objective Lens SIM Scanning type Beam Laser / Detector Collimator Lens Fig. 1 Solid Immersion Lens (SIL) Fig. 2 Solid Immersion Mirror ( SIM) The recording density of 50Gbpsi has been already attained with a SIL, which is the highest one in a single layered recording [3]. These devices are also suitable for the OAM (opticallyassisted magnetic) recording technologies with avoiding the super paramagnetic problem in HDD [4]. However, non-removable type system is preferred to the near field recording with a SIL or SIM because the air gap between their surface and recording layers should be reduced to le ss than 100nm so as to the evanescent wave penetrate into the recording layers . In such kind of usage, the HDD is a main competitor and so the head size and weight, especially it s height, should be reduced to those of the magnetic heads to make the volume density and transfer rat e become competitive. According to this standpoint, Fuji Xerox Co., Ltd proposed three years ago an optical head with a new type of a solid immersion mirror which consists of a hemi-paraboroidal, refl ecting surface, and incident and Key Engineering Materials Online: 2003-04-15 ISSN: 1662-9795, Vols. 238-239, pp 83-88 doi:10.4028/www.scientific.net/KEM.238-239.83

Development of Large Ultraprecision Mirror Surface Grinding System with Elid

This paper introduces a new ultraprecision mirror surface machining system with ELID (Electrolytic In-Process Dressing). The machine has three linear axes, which can be controlled at a feeding resolution of 10nm under full closed feedback. 3-axes double hydrostatic guideway are used for sliding the machine, and hydrostatic bearing is used for the grinding wheel spindle. Ultraprecision mirror surface grinding, which achieved a surface roughness of 0.007 microns in Ra and surface straightness of 0.25 microns for a metal mold steel, was stably realized.

Fabrication and optical characteristics of a hemi-paraboloidal solid immersion mirror and designing of an optical head with the mirror

A hemi-paraboloidal solid immersion mirror is successfully fabricated with the ELID (electrolytic in-process dressing) grinding technology and the spot size obtained was 150% of that for diffraction limited processes. Small sized optical head would be possible with the HP-SIM, which size is comparable to that of a magnetic head for HDDs.

Development of an On-Machine Observation and Profile Measurement System with an AFM and its Properties

Ultraprecision optical components, such as X-ray mirrors, require ultrafine smooth surface quality of the order of sub-nanometer or sub-angstrom in Ra. To evaluate the surface quality more accurately, AFM was used on a machine after each polishing procedure. When the surface roughness of an X-ray mirror was measured on the machine with AFM, a fine surface quality of sub-nanometer in Ra, which is almost on the same level as that of the AFM resolution, was evaluated successfully. The measured data has a small vibration error of about 300Hz. The possibility of on-machine surface roughness measurement with AFM was confirmed experimentally. Introduction Ultraprecision optical components, such as X-ray mirrors used in the synchrotron radiation faculties, require ultrafine smooth surface quality of sub-nanometer or sub-angstrom in Ra. And some mirrors require the length from several hundred millimeters to more than 1 meter. In the measurement of the surface roughness of these large-scaled and ultrafine components, there were some problems. For example, these mirrors are too large to measure with the conventional surface roughness measuring instruments, and it takes efforts to move them to the measuring instrument. The conventional handy-type surface roughness measuring instruments have not enough measuring resolution for X-ray mirrors [1-3]. In this paper, the new surface roughness measuring system, in which a compact-type AFM (atomic force microscope) with which the surface fine structures can be measured accurately is mounted on the machine, was developed. On-Machine Surface Roughness Measuring System with AFM Fig.1 shows the on-machine surface roughness measuring system with AFM. Since the stages of the ultraprecision machine are positioned in about 10 nanometers with the full closed loop control, the vibration in about 20-50 nanometers caused by the servo control is happened continuously. The measuring resolution of AFM is so fine that this vibration might become the cause of errors. Then the AFM measuring head is mounted directly on the machine stage, and it can move together with the stage and the measured object. Thus the effect of vibration to measurement was removed. By mounting the AFM head on the machine, it is possible to measure the surface roughness in the any size of the measured object accurately without removing it from the machine. Since it is possible to confirm if the surface roughness has been satisfied with the requirement during the polishing Key Engineering Materials Online: 2003-04-15 ISSN: 1662-9795, Vols. 238-239, pp 153-156 doi:10.4028/www.scientific.net/KEM.238-239.153

Improvement in the Ground Surface Roughness of Fused Silica X-Ray Mirror with ELID-Grinding

Troidal fused silica X-ray mirrors measuring 300 mm long used for powerful X-ray sources like synchrotron radiation were ground using a large ultra -precision aspherical ELID grinding system. In order to reduce the finishing time, methods to i mprove the ground surface roughness by ELID grinding were investigated. The results show that optimization of grinding conditions such as adoption of micro depth of grinding, use of the #4000 grindi n wheel, and selection of an appropriate wheel feed direction realizes a surface roughness of Ra8.7nm.

Grinding Characteristics of Cemented Carbide Concave Mirror by Desk-top Type 4-axes Machine “TRIDER-X” with ELID System

In this study, we attempted to develop a desk-top 4-axes machine “TRIDER-X” mounting a ELID system. This paper describes concepts and history of the machine, and detailed investigations on the performance of the machine. A concave mirror was ground using the desk-top 4-axes machine “TRIDER-X” mounting an ELID system. Good form accuracy was achieved.