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Dive into the research topics where Seiji Sagawa is active.

Publication


Featured researches published by Seiji Sagawa.


Archive | 2004

Beam source and beam treatment device

Akira Fukuda; Hirokuni Hiyama; Katsunori Ichiki; Seiji Sagawa; Akio Shibata; Kazuo Yamauchi; 克則 一木; 誠二 寒川; 和雄 山内; 明夫 柴田; 浩国 檜山; 明 福田


Archive | 1995

Plasma treatment and device thereof

Seiji Sagawa; 誠二 寒川


Archive | 1996

Plasma generator and surface treatment device using this plasma generator

Hiroyuki Kamiyama; Kojin Nakagawa; Seiji Sagawa; Kibatsu Shinohara; Tsutomu Tsukada; 寛幸 上山; 行人 中川; 勉 塚田; 誠二 寒川; 己拔 篠原


Archive | 1993

Method and device for plasma etching

Seiji Sagawa; 誠二 寒川


Archive | 1996

Neutral particle beam treatment apparatus

Hirokuni Hiyama; Katsunori Ichiki; Seiji Sagawa; Kazuo Yamauchi; 克則 一木; 誠二 寒川; 和雄 山内; 浩国 桧山


Archive | 1996

Plasma exciting antenna and plasma processor

Hiroyuki Kamiyama; Hirobumi Matsumoto; Kojin Nakagawa; Seiji Sagawa; Kibatsu Shinohara; Tsutomu Tsukada; 寛幸 上山; 行人 中川; 勉 塚田; 誠二 寒川; 博文 松本; 己拔 篠原


Archive | 2003

Plasma treatment method, plasma etching method, and method of manufacturing solid-state imaging element

Mitsuru Okikawa; Seiji Sagawa; 誠二 寒川; 満 沖川


Archive | 2003

Plasma surface treatment apparatus and method therefor

Seiichi Fukuda; Seiji Sagawa; 誠二 寒川; 誠一 福田


Archive | 2008

Method for measuring resistance value of contact hole sidewall

Shinji Kawada; Seiji Sagawa; Yoichi Yatagai; 洋一 八田谷; 誠二 寒川; 進二 河田


Archive | 1998

Treatment method and apparatus for substrate

Seiji Sagawa; Kenichiro Tsuda; 誠二 寒川; 健一郎 津田

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