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Seiro Murakami

Nikon

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Publication

Featured researches published by Seiro Murakami.

Archive | 2002

Exposure method and apparatus

Yasuaki Tanaka; Seiro Murakami; Kenji Nishi

Archive | 1996

Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system

Kenji Nishi; Kazuo Ushida; Seiro Murakami; Tohru Kiuchi; Yasuaki Tanaka

Archive | 1998

Projection exposure method and projection aligner

Shigeru Hirukawa; Kyoichi Suwa; Seiro Murakami; Masahiro Nei

Archive | 1988

Apparatus for detecting position of reference pattern

Seiro Murakami; Akikazu Tanimoto; Susumu Makinouchi; Hidemi Kawai; Masaichi Murakami

Archive | 1996

Projection exposure apparatus correcting tilt of telecentricity

Kenji Nishi; Seiro Murakami; Hiroshi Chiba

Archive | 1994

Method of driving mask stage and method of mask alignment

Kenji Nishi; Seiro Murakami

Archive | 2003

Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same

Seiro Murakami; Takaharu Miura; Akikazu Tanimoto; Yutaka Ichihara; Hideo Mizutani

Archive | 1998

Aligner, exposure method and device manufacturing method

Seiro Murakami; Takaharu Miura; Akikazu Tanimoto; Yutaka Ichihara; Hideo Mizutani

Archive | 1999

Exposure method, exposure apparatus and preparation method of device

Yasuyuki Sakakibara; Yasuaki Tanaka; Seiro Murakami; Kenji Nishi

1989 Microlithography Conferences | 1989

New-Generation Optical Stepper With High N.A. g-Line Lens

Koichi Matsumoto; Kazuo Ushida; Hidemi Kawai; Masahiro Nei; Seiro Murakami; Shinichi Nakamura; Masaomi Kameyama

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Collaboration

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Kenji Nishi

Nikon

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Yasuaki Tanaka

Nikon

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Masahiro Nei

Nikon

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Akikazu Tanimoto

Nikon

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Kyoichi Suwa

Nikon

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Shigeru Hirukawa

Nikon

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Hidemi Kawai

Nikon

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Hideo Mizutani

Nikon

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Kazuo Ushida

Nikon

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Takaharu Miura

Nikon

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