Serge Spirkovitch
ESIEE
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Publication
Featured researches published by Serge Spirkovitch.
Laser-Assisted Fabrication of Thin Films and Microstructures | 1994
Hocine Ziad; Serge Spirkovitch; Jeannine Marty; François Baillieu; Serge Rigo; Neil Milne
A top-drive variable capacitance (VC) electrostatic rotational micromotor with double stator was fabricated combining bulk silicon machining with etch stop on junction to anodic bonding of silicon to glass. The novel process overcomes the drawbacks found in the fabrication of top- drive devices by use of usual surface micromachining of polysilicon LPCVD layers.
Sensors and Actuators B-chemical | 2001
Marcel Bouvet; G. Guillaud; Arnaud Leroy; André Maillard; Serge Spirkovitch; François-Genes Tournilhac
Sensors and Actuators B-chemical | 2001
Marcel Bouvet; Arnaud Leroy; Jacques Simon; François-Genes Tournilhac; G Guillaud; P Lessnick; A Maillard; Serge Spirkovitch; Marc Debliquy; A. de Haan; André Decroly
Archive | 1986
Pierre Andre; François Baillieu; Jean-Pierre Yves Brosselard; Gérard Dreyfus; Alfred Permuy; Francois-Xavier Pirot; Serge Spirkovitch
Archive | 1987
Andre Pierre; Francois Batllteu; Jean-Pierre Yves Brosselard; Alfred Permuy; Francois-Xavier Pirot; Serge Spirkovitch
Archive | 1990
Eric Donzier; Isabelle Thomas; Serge Spirkovitch; François Baillieu
Archive | 1994
Eric Donzier; Isabelle Thomas; Serge Spirkovitch; François Baillieu
Archive | 1987
Pierre Andre; François Baillieu; Jean-Pierre Yves Brosselard; Alfred Permuy; Francois-Xavier Pirot; Serge Spirkovitch
Archive | 1990
Eric Donzier; Isabelle Thomas; Serge Spirkovitch; François Baillieu
Archive | 1987
Pierre Andre; François Baillieu; Jean-Pierre Yves Brosselard; Alfred Permuy; Francois-Xavier Pirot; Serge Spirkovitch
Collaboration
Dive into the Serge Spirkovitch's collaboration.
