Setsuo Akiyama
Bridgestone
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Publication
Featured researches published by Setsuo Akiyama.
Advanced Materials '93#R##N#Biomaterials, Organic and Intelligent Materials | 1994
Kibong Song; Setsuo Akiyama; Masahiko Naoe
Distribution of magnetic field in facing targets sputtering (FTS) apparatus have been measured by using a gaussmeter. Perpendicular line of force between target planes and extremely high magnetic field above target edge confined plasma almost perfectly and substrates could be placed in plasma-free region even for ferromagnetic targets. Parameters important for controlling distribution and strength of magnetic field in FTS system seemed to be distance between targets, target magnetism, performance of magnet and distance between target and magnet, in order of influence degree.
Archive | 1988
Masato Yoshikawa; Yukihiro Kusano; Setsuo Akiyama; Kazuo Naito; Satiko Okazaki; Masuhiro Kogoma
Archive | 1993
Yukihiro Kusano; Tomoko Inagaki; Masato Yoshikawa; Setsuo Akiyama; Kazuo Naitoh
Archive | 1986
Setsuo Akiyama; Yukio Fukuura; Masato Yoshikawa; Takeyuki Matsuda; Hisanobu Monobe; Shigeki Ohkubo; Shiro Yoshida
Archive | 1984
Setsuo Akiyama; Yukio Fukuura; Masato Yoshikawa; Takeyuki Matsuda; Hisanobu Monobe; Shigeki Ohkubo; Shiro Yoshida
Archive | 1980
Toshio Honda; Masao Ogawa; Yukio Fukuura; Hikaru Ishikawa; Kazuo Naito; Setsuo Akiyama; Itsuo Tanuma
Archive | 1985
Tomio Oyachi; Minoru Takahashi; Koichi Izuhara; Setsuo Akiyama; Masato Yoshikawa
Archive | 1988
Masato Yoshikawa; Yukio Fukuura; Setsuo Akiyama; Makoto Nakamura; Kazuo Naito; Toshio Honda
Archive | 1993
Setsuo Akiyama; Tomoko Inagaki; Yukihiro Kusano; Kazuo Naitoh; Masato Yoshikawa
Archive | 1993
Masato Yoshikawa; Yukio Fukuura; Setsuo Akiyama; Makoto Nakamura; Kazuo Naito; Toshio Honda
