Shibata Hirofumi | Researchain

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Publication

Featured researches published by Shibata Hirofumi.

Archive | 1989

STRUCTURE OF LITHOGRAPHY MASK

Shibata Hirofumi; Fukuda Yoshiaki

Archive | 1986

PRODUCTION OF MASK STRUCTURAL BODY FOR X-RAY LITHOGRAPHY

Kato Hideo; Matsushima Masaaki; Matsuda Keiko; Shibata Hirofumi

Archive | 1989

X-RAY EXPOSURE AND APPLICABLE MASK

Kato Hideo; Chiba Keiko; Shibata Hirofumi

Archive | 1986

X-RAY LITHOGRAPHY METHOD AND MASK HOLDING BODY FOR X-RAY LITHOGRAPHY

Kato Hideo; Matsushima Masaaki; Matsuda Keiko; Shibata Hirofumi

Archive | 1986

LITHOGRAPHIC MASK STRUCTURE

Shibata Hirofumi; Matsuda Keiko; Kato Hideo

Archive | 1986

MASK STRUCTURAL BODY FOR LITHOGRAPHY

Kato Hideo; Matsushima Masaaki; Matsushita Keiko; Shibata Hirofumi

Archive | 1986

MASKENSTRUKTUR FUER DIE LITHOGRAFIE, VERFAHREN ZU IHRER HERSTELLUNG UND LITHOGRAFIEVERFAHREN

Kato Hideo; Matsushima Masaaki; Matsuda Keiko; Shibata Hirofumi

Archive | 1990

X-RAY MASK STRUCTURE BODY, X-RAY ALIGNER AND X-RAY EXPOSURE

Shibata Hirofumi; Fukuda Yoshiaki

Archive | 1988

LITHOGRAPHY AND MASK STRUCTURE FOR LITHOGRAPHY

Chiba Keiko; Fujioka Hidehiko; Shibata Hirofumi; Kato Hideo; Kawai Yasuo

Archive | 1986

LITHOGRAPHIC METHOD AND LITHOGRAPHIC MASK HOLDER

Kato Hideo; Matsushima Masaaki; Matsuda Keiko; Shibata Hirofumi

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Collaboration

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Kato Hideo

Canon Inc.

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Matsuda Keiko

Canon Inc.

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Matsushima Masaaki

Canon Inc.

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Chiba Keiko

Canon Inc.

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Matsushita Keiko

Canon Inc.

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