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Shigehiro Nagura

Shin-Etsu Chemical

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Publication

Featured researches published by Shigehiro Nagura.

Archive | 2001

High molecular weight silicone compounds resist compositions, and patterning method

Mutsuo Nakashima; Ichiro Kaneko; Toshinobu Ishihara; Junji Tsuchiya; Jun Hatakeyama; Shigehiro Nagura

Archive | 2000

Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group

Satoshi Watanabe; Osamu Watanabe; Tomoyoshi Furihata; Yoshihumi Takeda; Shigehiro Nagura; Toshinobu Ishihara; Tsuguo Yamaoka

Archive | 2003

Resist material and patterning process

Toshinobu Ishihara; Takeshi Kanou; Tomohiro Kobayashi; Shigehiro Nagura; Tsunehiro Nishi; Satoshi Watanabe; 茂広 名倉; 知洋 小林; 聡 渡邉; 俊信 石原; 恒寛 西; 剛 金生

Archive | 1989

Sustained-release pheromone dispenser

Akira Yamamoto; Ryuichi Saguchi; Shigehiro Nagura

Archive | 1998

Polymeric compounds, chemically amplified positive type resist materials and process for pattern formation

Tsunehiro Nishi; Jun Hatakeyama; Shigehiro Nagura; Toshinobu Ishihara

Archive | 1996

Sulfonium salts and chemically amplified positive resist compositions

Yoichi Osawa; Satoshi Watanabe; Katsuya Takemura; Shigehiro Nagura; Akinobu Tanaka; Yoshio Kawai

Archive | 1998

High molecular weight silicone compound, chemically amplified positive resist composition and patterning method

Ichiro Kaneko; Mutsuo Nakashima; Toshinobu Ishihara; Junji Tsuchiya; Jun Hatakeyama; Shigehiro Nagura

Archive | 2000

Onium salts, photoacid generators for resist compositions, resist compositions, and patterning process

Youichi Ohsawa; Jun Watanabe; Wataru Kusaki; Satoshi Watanabe; Takeshi Nagata; Shigehiro Nagura

Archive | 1998

Polymeric silicone compound, resist material and pattern formation

Jun Hatakeyama; Toshinobu Ishihara; Ichiro Kaneko; Shigehiro Nagura; Mutsuo Nakajima; Junji Tsuchiya; 睦雄 中島; 茂広 名倉; 純司 土谷; 畠山 潤; 俊信 石原; 一郎 金子

Archive | 1985

Composite hollow fiber

Minoru Takamizawa; Akira Yamamoto; Shigehiro Nagura

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Collaboration

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Satoshi Watanabe

Shin-Etsu Chemical

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Kanji Murofushi

Shin-Etsu Chemical

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Taira Homma

Shin-Etsu Chemical

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Toshinobu Ishihara

East Tennessee State University

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Akira Yamamoto

East Tennessee State University

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Toshinobu Ishihara

East Tennessee State University

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Akira Yamamoto

East Tennessee State University

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Kinya Ogawa

Shin-Etsu Chemical

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Jun Hatakeyama

Shin-Etsu Chemical

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Kazumasa Maruyama

Shin-Etsu Chemical

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