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Dive into the research topics where Shigeji Kuroda is active.

Publication


Featured researches published by Shigeji Kuroda.


Japanese Journal of Applied Physics | 1990

Polarity Effects on the Corona and Breakdown of Mixture (SF6/N2) in a Needle-Plane Gap under Pulse Voltage

Hiroshi Nakayama; Mitsuyoshi Onoda; Shigeji Kuroda; Kiyoshi Amakawa

The polarity effects of the corona and the breakdown characteristics of mixtures (SF6/N2) were investigated in the needle-plane gap, using pulses with various rise times. The polarity effects were remarkable both on the corona initiation and breakdown voltages. Several bright spots were seen on the negative needle surface. Negative breakdown voltage, especially under pulses with short rise time, was higher than the positive breakdown voltage.


Japanese Journal of Applied Physics | 1988

Breakdown Characteristics of SF6-N2 Mixture in High Nonuniform Field Gap under Pulse Voltage

Hiroshi Nakayama; Mitsuyoshi Onoda; Shigeji Kuroda; Kiyoshi Amakawa

The corona and breakdown characteristics of gas mixtures were investigated in a positive needle gap, using µs pulse voltage with various rise times. The breakdown voltage reached a maximum value as the rise time increased, and reduced at longer rise times. An extremely high breakdown voltage was obtained with the addition of a very small percentage of SF6 to N2.


Archive | 1996

Method and apparatus for peeling protective adhesive tape from semiconductor wafer

Shigeji Kuroda; Takao Matsushita; Saburo Miyamoto


Archive | 1998

Resist removing apparatus and method

Masayuki Yamamoto; Makoto Namikawa; Eiji Toyoda; Shigeji Kuroda; Saburo Miyamoto; Takao Matsushita


Archive | 1989

Semiconductor wafer processing system

Shigeji Kuroda; Toshiyuki Sekido; Kazuhiro Noda; Matsuro Kinbara


Archive | 1998

Automatic semiconductor wafer applying apparatus

Takao Matsushita; Shigeji Kuroda; Yoshinobu Ide


Archive | 1998

Resist removing method

Masayuki Yamamoto; Makoto Namikawa; Eiji Toyoda; Shigeji Kuroda; Saburo Miyamoto; Takao Matsushita


Archive | 1989

Processing system for semiconductor wafers

Shigeji Kuroda; Toshiyuki Sekido; Kazuhiro Noda; Matsuro Kinbara


Archive | 1996

Procede et appareil de decollage de la bande de protection adhesive d'une tranche de semi-conducteurs

Shigeji Kuroda; Takao Matsuchita; Saburo Miyamoto


Ieej Transactions on Fundamentals and Materials | 1990

Breakdown Characteristics of Electro-Negative Gases under Needle-Plane Gap

Hiroshi Nakayama; Mitsuyoshi Onoda; Shigeji Kuroda; Kiyoshi Amakawa

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