Shigeki Nishina

3D Imaging and analysis system using terahertz waves

We have developed the “3D Imaging Analysis System” that uses terahertz waves, the worlds first such system for practical applications. This system has an unprecedented capability for nondestructive three-dimensional spectroscopic analysis of the spatial distribution of constituents.

3D Spectroscopic computed tomography imaging using terahertz waves

We have developed a three-dimensional spectroscopic imaging system that uses terahertz waves and is based on transmission computed tomography. Using this system, we demonstrate transmission three-dimensional computed tomography imaging of high refractive index objects, with identification of chemical components, by analyzing spectroscopic information.

Failure analysis of LSI interconnection by terahertz time-domain reflectometry

It is getting significant to identify the fault location in advanced IC packaging technology. However, challenges have been posed to precisely determine the fault location in the failure analysis process, which is difficult to be handled by the conventional electronic based time domain reflectometry. In this work, we developed a time-domain reflectometry technology with extremely small distance-to-fault measurement error less than 50 μm, which includes X-ray length measuring error, by introducing pulsed terahertz probing signal to Quad Flat Package.