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Shigeto Izumi

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Publication

Featured researches published by Shigeto Izumi.

Archive | 1998

Carrier and CMP apparatus

Hatsuyuki Arai; Shigeto Izumi; Xu-Jin Wang; Misuo Sugiyama; Hisato Matsubara; Hideo Tanaka; Toshikuni Shimizu

Archive | 1997

Apparatus for applying an urging force to a wafer

Shigeto Izumi; Hatsuyuki Arai

Archive | 1999

Carriers and polishing apparatus

Xu-Jin Wang; Shigeto Izumi; Misuo Sugiyama; Hideo Tanaka

Archive | 1998

Chemical and mechanical polishing apparatus

Shigeto Izumi; Hatsuyuki Arai

Archive | 1999

Carrier and polishing apparatus

Shigeto Izumi; Misuo Sugiyama; Hideo Tanaka; Xu-Jin Wang

Archive | 2000

Carrier and polishing device

Kazutomo Hatano; Shigeto Izumi; Joshin O; Hideo Tanaka; 重人 泉; 和智 波田野; 序進 王; 秀男 田中

Archive | 1998

Semiconductor wafer polishing device

Hatsuyuki Arai; Shigeto Izumi

Archive | 2001

Polishing equipment, method for manufacturing semiconductor device using the equipment, and semiconductor device manufactured using the method

Shigeto Izumi; 重人 泉

Archive | 2000

Polishing apparatus, method for manufacturing semiconductor device using the same and semiconductor device manufactured by this method

Shigeto Izumi; 重人 泉

Archive | 2000

POLISHING MACHINE, POLISHING METHOD OF SEMICONDUCTOR WAFER, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND MANUFACTURING EQUIPMENT

Shigeto Izumi; 重人 泉

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