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Shigeyuki Akiyama

Horiba

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Publication

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Archive | 1991

Particles in Ulsi Grade Chemicals and Their Adhesion to Silicon Surfaces

Mitsushi Itano; Ichiro Kawanabe; Frederick W. Kern; Masayuki Miyashita; Reed W. Rosenberg; Tadahiro Ohmi; Ryosuke Fukushima; Shigeyuki Akiyama

Despite the advancement of dry processing in ULSI manufacturing, wet chemical cleaning remains the only reliable method for controlling particulate contamination on semiconductor wafer surfaces.

Archive | 1992

Electromagnetic induction-type conductivity meter with improved calibration with auxiliary circuit

Shigeyuki Akiyama; Tatsuhide Tsutsui

Archive | 2007

Catalyst for reducing mercury, a mercury conversion unit, and an apparatus for measuring total mercury in combustion exhaust gas by using the same

Shigeyuki Akiyama; Junji Kato; Fujio Koga; Koji Ishikawa

Archive | 2002

NOx concentration-measuring apparatus

Shigeyuki Akiyama; Satoshi Inoue; Masahiko Fujiwara

Archive | 1994

Gas analyzer and gas-analyzing mechanism

Masahiko Fujiwara; Shigeyuki Akiyama; Masahiko Ishida; Satoshi Inoue

Archive | 1991

Detector assembly for an electromagnetic induction-type conductivity meter

Hiroo Matsumoto; Shigeyuki Akiyama

Archive | 1988

Apparatus for measuring fine particles in liquid

Riichiro Suzuki; Shigeyuki Akiyama; Yoshihiro Kubo

Archive | 2009

Stack-gas measuring apparatus and stack-gas measuring method

Shigeyuki Akiyama; Atsushi Yamamoto; Takuji Oida

Archive | 2014

Gas analyzing apparatus

Naohito Shimizu; Shigeyuki Akiyama; Masahiko Fujiwara; Satoshi Inoue; Takuji Oida

Archive | 2008

METHOD AND APPARATUS FOR REMOVING SELENIUM OXIDE IN A SAMPLE, AND METHOD AND APPARATUS FOR MEASURING MERCURY IN COAL COMBUSTION EXHAUST GAS BY USING THE SAME

Junji Kato; Shigeyuki Akiyama; Fujio Koga; Koji Ishikawa

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Masahiko Fujiwara

Horiba

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Naohito Shimizu

Horiba

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Satoshi Inoue

Horiba

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Takuji Oida

Horiba

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Fujio Koga

Horiba

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Junji Kato

Horiba

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Koji Ishikawa

Horiba

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Hiroo Matsumoto

Horiba

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Masahiko Ishida

Horiba

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Atsushi Yamamoto

Horiba

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