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Shimizu Akira

Tokyo Electron

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Publication

Featured researches published by Shimizu Akira.

Archive | 2015

METHOD AND APPARATUS FOR FORMING SILICON OXYCARBONITRIDE FILM, SILICON OXYCARBIDE FILM AND SILICON OXYNITRIDE FILM

Shimizu Akira

Archive | 2018

Nitride film forming method using nitrading active species

Hasebe Kazuhide; Shimizu Akira

Archive | 2017

CARBON FILM DEPOSITION METHOD, AND FILM DEPOSITION APPARATUS

Kitamura Masayuki; Shimizu Akira; Watanabe Yosuke

Archive | 2017

METHOD OF FORMING CARBON FILM, APPARATUS OF FORMING CARBON FILM AND STORAGE MEDIUM

Shimizu Akira; Kitamura Masayuki; Watanabe Yosuke; Kakimoto Akinobu

Archive | 2017

METHOD FOR FORMING NITRIDE FILM

Hasebe Kazuhide; Shimizu Akira

Archive | 2017

METHOD AND DEVICE FOR DEPOSITING CARBON FILM

Shimizu Akira; Kitamura Masayuki; Watanabe Yosuke; Kakimoto Akinobu

Archive | 2017

NITRIDE FILM FORMING METHOD

Hasebe Kazuhide; Shimizu Akira

Archive | 2017

CARBON FILM FORMING METHOD, CARBON FILM FORMING APPARATUS, AND STORAGE MEDIUM

Shimizu Akira; Kitamura Masayuki; Watanabe Yosuke

Archive | 2016

CARBON FILM DEPOSITION METHOD AND FILM DEPOSITION DEVICE

Kitamura Masayuki; Mizunaga Satoru; Shimizu Akira; Kakimoto Akinobu

Archive | 2016

FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS OF CARBON FILM

Kitamura Masayuki; Mizunaga Satoru; Shimizu Akira; Kakimoto Akinobu

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Collaboration

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Kitamura Masayuki

Tokyo Electron

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Hasebe Kazuhide

Tokyo Electron

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Watanabe Yosuke

Tokyo Electron

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Ikeuchi Toshiyuki

Tokyo Electron

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Kim Cheoljung

Tokyo Electron

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Chiba Yoichiro

Tokyo Electron

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Kuroda Rihito

Tohoku University

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Sugawa Shigetoshi

Canon Inc.

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Suwa Tomoyuki

Tohoku University

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Suzuki Daisuke

Tokyo Electron

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