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Shimogaki Yukihiro

University of Tokyo

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Publication

Featured researches published by Shimogaki Yukihiro.

Archive | 2009

Semiconductor substrate, method for manufacturing semiconductor substrate and semiconductor device

Sugiyama Masakazu; Shimogaki Yukihiro; Hata Masahiko; Ichikawa Osamu

IEICE technical report. Speech | 2016

Fabrication of highly reliable Co(W) thin film by physical vapor deposition for next generation ULSI Cu interconnects (シリコン材料・デバイス)

Kim Taewoong; Tomita Kouta; Momose Takeshi; Tsunoda Takaaki; Moriwaki Takayuki; Shimogaki Yukihiro

Archive | 2015

Method for manufacturing heat resistant composite material and manufacturing device

Nakamura Takeshi; Ishizaki Masato; Fuchigami Kenji; Hotozuka Kozue; Shimogaki Yukihiro; Momose Takeshi; Fukushima Yasuyuki; Sato Noboru; Funato Yuichi; Sugiura Hidetoshi

Archive | 2011

FILM DEPOSITION METHOD, FILM DEPOSITION APPARATUS, AND LAYERED FILM

Yamada Hideo; Asaumi Kazushi; Momose Takeshi; Sugiyama Masakazu; Shimogaki Yukihiro

Archive | 2005

SYSTEM OR METHOD FOR SIMULATION USING HYBRID REACTION MODEL

Suetomi Hidekazu; Fukazawa Koji; Shimogaki Yukihiro; Sugiyama Masakazu; Noda Masaru

Archive | 2002

METHOD FOR GROWING CRYSTAL OF COMPOUND SEMICONDUCTOR BY MOVPE

Nakano Yoshiaki; Shimogaki Yukihiro; Nakano Takayuki; Fukushima Yasuyuki

Archive | 2001

FILM DEPOSITION DEVICE AND FILM DEPOSITION METHOD

Yamada Hideo; Kitamura Yasuhiro; Ohara Atsushi; Sugiyama Masakazu; Shimogaki Yukihiro; Momose Takeshi; Kondo Aiko; Uchida Hirohisa

Archive | 2018

SILICON COMPOUND MATERIAL PRODUCTION METHOD AND SILICON COMPOUND MATERIAL PRODUCTION DEVICE

Fukushima Yasuyuki; Hotozuka Kozue; Tanaka Yasutomo; Akikubo Kazuma; Nakamura Takeshi; Shimogaki Yukihiro; Momose Takeshi; Sato Noboru; Shima Kohei; Funato Yuichi

応用物理学会春季学術講演会講演予稿集(CD-ROM) | 2017

ULSI‐Cu配線の信頼性向上に向けた極薄PVD‐Co(W)単層バリア/ライナーの特性評価

Kim Taewoong; Momose Takeshi; Matsuo Akira; Seino Takuya; Shimogaki Yukihiro

Journal of Supercritical Fluids | 2017

高温における超臨界CO_2における有機金属の拡散率を推定するための実験的アプローチ【Powered by NICT】

Zhao Yu; Shimoyama Yusuke; Momose Takeshi; Shimogaki Yukihiro

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Momose Takeshi

University of Tokyo

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Fukushima Yasuyuki

University of Tokyo

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Shima Kohei

University of Tokyo

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Funato Yuichi

University of Tokyo

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Hotozuka Kozue

University of Tokyo

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Nakamura Takeshi

IHI Corporation

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Sugiura Hidetoshi

University of Tokyo

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Ishizaki Masato

University of Tokyo

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Sato Noboru

University of Tokyo

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Fuchigami Kenji

University of Tokyo

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