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Shin Matsui

Canon Inc.

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Publication

Featured researches published by Shin Matsui.

Archive | 1998

Stage system and exposure apparatus with the same

Shin Matsui; Shinji Ohishi; Eiji Osanai; Tadayuki Kubo

Archive | 1995

Substrate holding device and exposing apparatus using the same

Yuji Chiba; Nobutoshi Mizusawa; Kazunori Iwamoto; Yutaka Tanaka; Shinichi Hara; Mitsuji Marumo; Shin Matsui; Hiroshi Kurosawa

Archive | 2003

PROCESSING APPARATUS, MEASURING APPARATUS, AND DEVICE MANUFACTURING METHOD

Shinichi Hara; Yutaka Tanaka; Shigeru Terashima; Takayuki Hasegawa; Shin Matsui

Archive | 2001

Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method

Shin Matsui

Archive | 2007

Holding system, exposure apparatus, and device manufacturing method

Shin Matsui

Archive | 1999

Processing apparatus with pressure control and gas recirculation system

Shinichi Hara; Yutaka Tanaka; Shigeru Terashima; Takayuki Hasegawa; Shin Matsui

Archive | 2002

POSITIONING STAGE SYSTEM AND POSITION MEASURING METHOD

Shin Matsui

Archive | 1993

Substrate conveying apparatus

Shin Matsui; Takao Kariya; Nobutoshi Mizusawa; Ryuichi Ebinuma; Shunichi Uzawa

Archive | 2010

SUBSTRATE HOLDING APPARATUS, CARRIER, SUBSTRATE PROCESSING APPARATUS, AND IMAGE DISPLAY DEVICE MANUFACTURING METHOD

Masato Inoue; Shin Matsui; Yasuo Kato

Archive | 2009

DISPLAY SUBSTRATE MANUFACTURING METHOD AND VACUUM PROCESSING APPARATUS

Masato Inoue; Shin Matsui

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Collaboration

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Shigeru Terashima

Canon Inc.

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Shinichi Hara

Canon Inc.

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Toshiaki Himeji

Canon Inc.

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Yutaka Tanaka

Canon Inc.

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Takayuki Hasegawa

Canon Inc.

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Masato Muraki

Canon Inc.

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Nobutoshi Mizusawa

Canon Inc.

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Akira Miyake

Canon Inc.

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Eiji Osanai

Canon Inc.

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Hiroshi Kurosawa

Canon Inc.

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