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Shinji Sakano

Tokyo Electron

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Publication

Featured researches published by Shinji Sakano.

Archive | 2004

Method and apparatus for evaluating processing apparatus status and predicting processing result

Shinji Sakano; Satoshi Harada

Archive | 2001

Method for predicting consumption of consumable part, method for predicting deposited-film thickness, and plasma processor

Shinji Sakano; Tsuyoshi Sendoda

Archive | 2001

Operation monitoring method for treatment apparatus

Shinji Sakano; Tsuyoshi Sendoda

Archive | 2000

Etching end-point detecting method

Susumu Saito; Shinji Sakano

Archive | 2002

Method of predicting processed results and processing device

Satoshi Harada; Shinji Sakano; Hideki Tanaka; Hideaki Sato

Archive | 2007

Substrate processing method and storage medium having program stored therein

Shigeru Kubota; Shinji Sakano

Archive | 2007

CONTROLLING DEVICE FOR SUBSTRATE PROCESSING APPARATUS AND METHOD THEREFOR

Shinji Sakano

Archive | 2005

Operation monitoring method, assessment method and anomaly detection method for treatment apparatus

Shinji Sakano; Tsuyoshi Sendoda

Archive | 2003

Procede de prediction d'etat de dispositif de traitement ou de resultat de traitement

Shinji Sakano; Satoshi Harada

Archive | 2003

Method of predicting processing device condition or processed result

Shinji Sakano; Satoshi Harada

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Collaboration

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Satoshi Harada

Tokyo Electron

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Tsuyoshi Sendoda

Tokyo Electron

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Shigeru Kubota

Tokyo Electron

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Susumu Saito

Tokyo Electron

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