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Shinsuke Hirano

Sony Broadcast & Professional Research Laboratories

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Publication

Featured researches published by Shinsuke Hirano.

Archive | 1999

Apparatus for processing glass substrate

Shinsuke Hirano; Kei Takatsu; Shingo Kadomura

Archive | 1997

Wafer stage for manufacturing a semiconductor device

Shingo Kadomura; Tomohide Jozaki; Shinsuke Hirano; Kinya Miyashita; Yoshiaki Tatsumi; Seiichirou Miyata

Archive | 1997

Static electricity chuck and wafer stage

Shingo Kadomura; Tomohide Jozaki; Shinsuke Hirano; Kinya Miyashita; Seiichirou Miyata; Yoshiaki Tatsumi

Archive | 1999

Method and apparatus for dry etching

Shingo Kadomura; Tomohide Jozaki; Shinsuke Hirano

Archive | 1998

Method and apparatus for temperature control of the semiconductor

Hitoshi Fujii; Shinsuke Hirano

Archive | 1998

Composite material and manufacturing method thereof, substrate processing apparatus and manufacturing method thereof, substrate mounting stage and manufacturing method thereof, and substrate processing method

Shingo Kadomura; Kei Takatsu; Shinsuke Hirano

Archive | 1997

Method of holding wafer, method of removing wafer and electrostatic chucking device

Shinsuke Hirano; Tomohide Jozaki

Archive | 1995

Electrostatic chuck and its controlling method

Tadashi Hattori; Shinsuke Hirano; Tomohide Shirosaki; 友秀城崎; 信介平野; 服部正

Archive | 2000

Electrostatic chucking device

Shinsuke Hirano; Tomohide Jozaki

Archive | 1993

Semiconductor manufacturing appartatus

Shinsuke Hirano; Shingo Kadomura; Kazuo Kikuchi; Junichi Sato; Tomohide Shirosaki; 淳一佐藤; 友秀城崎; 信介平野; 一夫菊地; 新吾門村

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Collaboration

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Junichi Sato

Tokai University

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Tadashi Hattori

Denso

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