Shinya Okazaki

Large Grain Poly-crystalline Si Films by Carbon Dioxide Laser Assisted SLG Method

0 1 2 Relative CDL energy density LG L( μm ) 2. Concept of CDL assisted SLG crystallization The scheme of CDL assisted SLG crystallization is shown in Figure 1. A CDL (a wavelength of 10.6um) module is added on to the XeCl excimer laser anneal system for SLG. The excimer laser is absorbed by an a-Si film; meanwhile, the CDL penetrates the a-Si film and is absorbed by a base coat layer. The base coat layer is heated with the CDL irradiation. On this heated condition, SLG crystallization, that is the excimer laser irradiation through a mask slit, is occurred. Then the heat flow by the excimer laser irradiation to the substrate is prevented; thereby, the SLG crystal length is expanded compared with the conventional SLG crystallization. 3