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Shiraishi Yutaka

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Publication

Featured researches published by Shiraishi Yutaka.

Archive | 2005

METHOD FOR EVALUATING FAULT OF SILICON SINGLE CRYSTAL

Suewaka Ryota; Saishoji Toshiaki; Shiraishi Yutaka; Yoshihara Akishi

Archive | 2017

TARGET SUPPLY DEVICE, PROCESSING DEVICE AND PROCESSING METHOD THEFEFOR

Hori Tsukasa; Shiraishi Yutaka; Ikesaka Shinya; Ishihara Takanobu; Umeki Toshiro

Proceedings of SPIE | 2016

新しい高出力HVM LPP‐EUV光源の性能

Mizoguchi Hakaru; Nakarai Hiroaki; Abe Tamotsu; Nowak Krzysztof M; Kawasuji Yasufumi; Tanaka Hiroshi; Watanabe Yukio; Hori Tsukasa; Kodama Takeshi; Shiraishi Yutaka; Yanagida Tatsuya; Yamada Tsuyoshi; Yamazaki Taku; Okazaki Shinji; Saitou Takashi

Archive | 2016

FILTER AND TARGET SUPPLY APPARATUS

Ichinose Tomohide; Iwamoto Fumio; Shiraishi Yutaka; Hori Tsukasa; Hoshino Hideo

Archive | 2016

TARGET SUPPLY DEVICE, TARGET MATERIAL REFINING METHOD, TARGET MATERIAL REFINING PROGRAM, RECORDING MEDIUM HAVING TARGET MATERIAL REFINING PROGRAM RECORDED THEREIN, AND TARGET GENERATOR

Iwamoto Fumio; Shiraishi Yutaka; Hori Tukasa; Wakabayashi Osamu

Archive | 2016

Chamber device, target generation method, and extreme ultraviolet light generation device

Ishihara Takanobu; Hori Tsukasa; Saito Takashi; Shiraishi Yutaka

IEEE Conference Proceedings | 2016

HVMリソグラフィーのための250W EUV光源の開発【Powered by NICT】

Mizoguchi Hakaru; Nakarai Hiroaki; Abe Tamotsu; Nowak Krzysztof M; Kawasuji Yasufumi; Tanaka Hiroshi; Watanabe Yukio; Hori Tsukasa; Kodama Takeshi; Shiraishi Yutaka; Yanagida Tatsuya; Yamada Tsuyoshi; Yamazaki Taku; Okazaki Shinji; Saitou Takashi

Archive | 2008

Herstellungsvorrichtung und Herstellungsverfahren für ein Einkristall-Halbleiter

Iida Tetsuhiro; Shiraishi Yutaka; Tomioka Junsuke

Archive | 2007

Control system and method for time variant system control object having idle time such as single crystal producing device by czochralski method

Bandoh Kenichi; Morimoto Shigeo; Okumura Takuji; Nagata Satoshi; Shimada Masaru; Tomioka Junsuke; Shiraishi Yutaka; Kodama Takeshi

Archive | 2007

Single-crystal semiconductor fabrication device and fabrication method thereof

Iida Tetsuhiro; Shiraishi Yutaka; Tomioka Junsuke

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