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Shirota Naoko

Asahi Glass Co.

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Publication

Featured researches published by Shirota Naoko.

Archive | 2007

RESIST PROTECTIVE FILM COMPOSITION

Shirota Naoko; Takebe Yoko; Sasaki Takashi; Yokokoji Osamu; Ou Jiyoshiyou

Archive | 2007

RESIST-PROTECTING FILM

Shirota Naoko; Takebe Yoko; Sasaki Takashi; Yokokoji Osamu

Archive | 2011

NEUE FLUORHALTIGE VERBINDUNG, FLUORHALTIGES POLYMER UND VERFAHREN ZUR HERSTELLUNG DER VERBINDUNG

Murata Koichi; Shirota Naoko; Yokokoji Osamu; Takebe Yoko

Archive | 2008

RESIST PROTECTIVE FILM COMPOSITION FOR LIQUID IMMERSION EXPOSURE AND METHOD FOR FORMING RESIST PATTERN

Takebe Yoko; Shirota Naoko; Kaneko Isamu; Yokokoji Osamu

Archive | 2007

Resist material for immersion lithography

Shirota Naoko; Wang Shu-Zhong; Yokokoji Osamu; Takebe Yoko; Matsukawa Yasuhisa; Shirakawa Daisuke

Archive | 2007

Resist composition for liquid immersion exposure

Shirota Naoko; Takebe Yoko; Yokokoji Osamu

Archive | 2007

FLUORINE-CONTAINING POLYMER SOLUTION COMPOSITION

Shirota Naoko; Wang Shu-Zhong; Yokokoji Osamu

Archive | 2008

RESIST MATERIAL FOR LITHOGRAPHY AND METHOD FOR FORMATION OF RESIST PATTERN

Takebe Yoko; Shirota Naoko; Yokokoji Osamu

Archive | 2008

MANUFACTURING METHOD OF SURFACE-TREATED BASE MATERIAL

Takebe Yoko; Shirota Naoko; Yokokoji Osamu

Archive | 2008

POLYMER FOR RESIST PROTECTIVE FILM AND METHOD OF FORMING RESIST PATTERN

Takebe Yoko; Shirota Naoko; Yokokoji Osamu

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Collaboration

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Yokokoji Osamu

Asahi Glass Co.

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Takebe Yoko

Asahi Glass Co.

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Murata Koichi

Asahi Glass Co.

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