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Dive into the research topics where Shizuma Kuribayashi is active.

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Featured researches published by Shizuma Kuribayashi.


Japanese Journal of Applied Physics | 2011

Effect of Excitation Frequency on the Spatial Distributions of a Surface Wave Plasma

Hiroshi Muta; Satoshi Nishida; Shizuma Kuribayashi; Naoki Yoshikawa; Ryota Komatsu; Kiichiro Uchino; Yoshinobu Kawai

Using different frequencies of 2.45 GHz and 915 MHz, the effect of excitation frequency on the spatial distributions of a surface wave plasma for 450 mm wafer processing was experimentally investigated at a medium pressure of 1 Torr. As a result, it was found that the mode number of standing waves which the surface waves form in the radial direction has great influence on the radial distribution of plasma density. Consequently, the plasma uniformity in the downstream region at 915 MHz was better than that at 2.45 GHz. On the other hand, the electron temperature was roughly constant and below 1.5 eV except in the vicinity of the quartz window at both frequencies.


Surface & Coatings Technology | 2013

Effect of VHF excitation frequency on localized deposition of silicon in non-equilibrium-plasma-enhanced CVD by an under-expanded supersonic jet

Shizuma Kuribayashi; Yoshihiro Tsunekawa; Shoji Akahori; Daisuke Ando; Jiro Nakamura; Satoshi Nishida; Hiroshi Muta; Yoshiaki Takeuchi; Yasuhiro Yamauchi; Hiromu Takatsuka


Thin Solid Films | 2012

Effect of the very high frequency plasma with a balanced power feeding on silicon film deposition

Hiroshi Muta; Kenta Mizuno; Satoshi Nishida; Shizuma Kuribayashi


Materials Transactions | 2017

Conductive Atomic Force Microscopy Measurements of Localized over Dark Current along Pyramidal Ridge Lines of Intrinsic Hydrogenated Amorphous Silicon Layer on Textured Crystalline

Hiroyuki Miwa; Satoshi Nishida; Masato Kanematsu; Shizuma Kuribayashi; Htay Win; Norimitsu Yoshida; Shuichi Nonomura


The Japan Society of Applied Physics | 2016

Research for high quality a-Si:H passivation layer in hetero junction

Junpei Sakamoto; Shota Yamamoto; Hiriyuki Miwa; Satoshi Nishida; Shizuma Kuribayashi


The Japan Society of Applied Physics | 2016

High-speed production of silicon nanoparticles by plasma jet CVD

Yusuke Nagai; Hirohito Hosokawa; Satoshi Nishida; Masaharu Komiyama; Shizuma Kuribayashi


Kagaku Kogaku Ronbunshu | 2015

Effect of Background Pressure on Deposition Rate and Crystallinity of Deposited Silicon in Non-Equilibrium Plasma Jet CVD

Satoshi Nishida; Ryo Nodo; Hiroshi Muta; Shizuma Kuribayashi


Journal of Japan Society of Fluid Mechanics | 2015

Plasma CVD with High Deposition Rate using High Speed Jets( Fluid Dynamics and Chemical Reaction)

Satoshi Nishida; Hiroshi Muta; Shizuma Kuribayashi


Journal of Chemical Engineering of Japan | 2014

Effect of Gas Flow Rate on the High-Rate, Localized Jet-Deposition of Silicon in SiH4/H2 PE-CVD

Satoshi Nishida; Hiroshi Muta; Shizuma Kuribayashi


The Proceedings of the Thermal Engineering Conference | 2013

B132 Experimental research of the degree of Si crystallinity controlling method in the non-equilibrium plasma jet CVD

Ryo Nodo; Takuma Matsunaga; Masahito Iseki; Hiroshi Muta; Satoshi Nishida; Shizuma Kuribayashi

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Hiromu Takatsuka

Mitsubishi Heavy Industries

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