Shu-Kwan Lau | Researchain

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Archive | 2013

Epitaxial chamber with customizable flow injection

Shu-Kwan Lau; Zhepeng Cong; Mehmet Tugrul Samir; Zhiyuan Ye; David K. Carlson; Xuebin Li; Errol Antonio C. Sanchez; Swaminathan Srinivasan

Archive | 2013

QUARTZ UPPER AND LOWER DOMES

Anzhong Chang; Paul Brillhart; Mehmet Tugrul Samir; Anh N. Nguyen; Kailash Kiran Patalay; Surajit Kumar; Steve Aboagye; David K. Carlson; Satheesh Kuppurao; Joseph M. Ranish; Oleg V. Serebryanov; Dongming Iu; Shu-Kwan Lau; Zouming Zhu; Herman Diniz

Archive | 2014

Susceptor support shaft for improved wafer temperature uniformity and process repeatability

Mehmet Tugrul Samir; Shu-Kwan Lau

Archive | 2014

Susceptor support shaft with uniformity tuning lenses for EPI process

Zhepeng Cong; Masato Ishii; Xuebin Li; Mehmet Tugrul Samir; Shu-Kwan Lau; Paul Brillhart

Archive | 2014

INJECT AND EXHAUST DESIGN FOR EPI CHAMBER FLOW MANIPULATION

Shu-Kwan Lau; Mehmet Tugrul Samir

Archive | 2014

Upper chamber liner

Shu-Kwan Lau; Mehmet Tugrul Samir

Archive | 2014

FLOW CONTROLLED LINER HAVING SPATIALLY DISTRIBUTED GAS PASSAGES

Mehmet Tugrul Samir; Shu-Kwan Lau

Archive | 2013

Lower chamber liner

Shu-Kwan Lau; Mehmet Tugrul Samir

Archive | 2016

INJECT INSERT FOR EPI CHAMBER

Shu-Kwan Lau; Mehmet Tugrul Samir; Aaron Miller

Archive | 2015

Substrate transfer mechanisms

Masato Ishii; Mehmet Tugrul Samir; Shu-Kwan Lau; Jeffrey Tobin

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