Silvia Maria Booij

A VCSEL-based miniature laser-self-mixing interferometer with integrated optical and electronic components

It has been previously published how, using two separate Vertical-Cavity-Surface-Emitting-Lasers (VCSELs), a miniature laser-Doppler interferometer can be made for quasi-three-dimensional displacement measurements. For the use in consumer applications as PC-mice, the manufacturing costs of such sensors need to be minimized. This paper describes the fabrication of a low-cost laser-self-mixing sensor by integrating silicon and GaAs components using flip-chip technology. Wafer-scale lens replication on GaAs wafers is used to achieve integrated optics. In this way a sensor was realized without an external lens and that uses only a single GaAs VCSEL crystal, while maintaining its quasi-three-dimensional sensor capabilities.

Optical design and laser ablation of surface textures: demonstrating total internal reflection

In lighting applications key drivers for optical design of surface textures are integration of optical elements, the disentanglement of optical functionality and appearance and late stage configuration. We investigated excimer laser ablation as a mastering technology for micro textured surfaces, where we targeted an increase in correspondence between surface design and ablated surface for high aspect ratio structures. To achieve this we have improved the photo mask design using a heuristic algorithm that corrects for the angular dependence of the ablation process and the loss of image resolution at ablation depths that exceed the depth of field. Using this approach we have been able to demonstrate close correspondence between designed and ablated facet structures up to 75° inclination at 75 μm depth. These facet design parameters allow for total internal reflection (TIR) as a means of beam deflection which is demonstrated in a range of mono shaped cone arrays in hexagonal tessellation. BSDF analysis was used to characterize the narrow TIR deflection beams that matched the peak positions of the design down to 28° apex. In addition, a single surface TIR-Fresnel lens design with focal distance 5 mm has been manufactured using this photo mask design algorithm and beam collimation up to 12° beam angle and 32° field angle is shown. These outcomes demonstrate that the laser ablation process intrinsically yields sufficient small dispersion in structure and fillet radii for lighting applications.