So Baba

Aerosol Deposition Method for Preparation of Lead Zirconate Titanate Thick Layer at Low Temperature –Improvement of Electrical Properties by Irradiation of Fast Atom Beam and Plasma

The improvement of the electrical properties of a lead zirconate titanate (PZT) layer and the reduction of the processing temperature in the aerosol deposition method (ADM) using irradiation of a fast atom beam (FAB) and plasma were investigated. The remanent polarization of the PZT layer deposited with oxygen FAB irradiation on a stainless steel substrate and annealed at 400°C for 10 min was 15 µC/cm2 which is 2 times higher than that without FAB irradiation. The dielectric permittivity (e) at 1 kHz–1 MHz was also improved by 25–45% by FAB irradiation for PZT layers, both as-deposited at room temperature and annealed at up to 400°C.

Influence of RF Power Supply on Electron-Cyclotron-Resonance Plasma with Mirror Confinement for SrTiO3 Thin Film Formation

In a low-pressure electron-cyclotron-resonance (ECR) plasma sputtering system with mirror confinement, variation of the plasma property by an RF power supply to the sputtering target has been studied. Without RF power supply, the electron temperature and the plasma density reached a maximum value around the center of the plasma column and around the ECR zone, respectively. These values became higher with increasing microwave power. With the introduction of RF power to the target material of SrTiO3 (STO), the ion flux and emission intensity of spectral lines in Ar gas were found to be negligibly varied. The ion and sputtered particle flux were found to be controlled by microwave power and RF power, respectively. A high film deposition rate was obtained, reaching a value of about 8.5 nm/min at a low gas pressure of 2.7×10-2 Pa.

Thickness dependence of electrical properties of PZT films deposited on metal substrates by laser-assisted aerosol deposition

Dependence of electrical properties-dielectric, ferroelectric, and piezoelectric properties-on film thickness was studied for lead-zirconate-titanate (PZT) thick films directly deposited onto stainless-steel (SUS) substrates in actuator devices by using a carbon dioxide (CO2), laser-assisted aerosol deposition technique. Optical spectroscopic analysis data and laser irradiation experiments revealed that absorption at a given wavelength by the film increased with increasing film thickness. Dielectric constant epsiv, remanent polarization value Pr, and coercive field strength Ec of PZT films directly deposited onto a SUS-based piezoelectric actuator substrate annealed by CO2 laser irradiation at 850degC improved with increasing film thickness, and for films thicker than 25 mum, e > 800, Pr > 40 muC/cm2, and Ec < 45 kV/cm. In contrast, the displacement of the SUS-based actuator with the laser-annealed PZT thick film decreased with increasing film thickness.

A study on the multilayer π-type thermoelectric power generation module using the metal direct bonding technology

The thermoelectric power generation device can take out electric energy from thermal energy directly. In order to transform a difference of temperature into electric power efficiently, it is common to make the thermoelement of N-type and P-type into pi structure. Since the thermoelectric power of an element was small, much pi structures needed to be connected with series, but when a large number were connected with series, there was a problem that internal resistance will become large. In this study, we propose a new multilayer π-type structure sandwiched between an insulating layer using a metal direct bonding technology. By using this technique, significantly lowered layered structure the electrical resistance of the joint portion, because it can be produced by laminating at least one hundred sheets at a time, even when using a metal material having low Seebeck effect, a sufficiently practical level. It can boost the voltage, a possible cost reduction of the device itself. Further, since the laminated π type structure fabricated. Each interface is tightly bonded by eutectic reaction, it is possible to use a structure having a power generation function.

Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition

To retain the driving properties of metal-based micro optical scanner derived by aerosol deposition (AD) technique, CO2 laser irradiation was used to anneal the PZT films deposited onto the stainless-steel substrate. Stainless-steel mirror and frame of the scanner with the film annealed by laser irradiation maintained their metallic luster. The scanner with the film annealed by laser irradiation at 600 °C for 1 min has a scanning angle over 30 degree that is comparable with the scanning angle of a similar scanner annealed by electric furnace at 600 °C for 10 min.

CO 2 laser annealing of Pb(Zr,Ti)O 3 aerosol-deposition film on stainless-steel-sheet

The ferroelectric and dielectric properties of Pb(Zr,Ti)O 3 (PZT) thick films, directly deposited onto stainless steel sheets using an aerosol deposition method (ADM), have been improved by the application of CO 2 laser irradiation. Values of the remanent polarization, coercive field, dielectric constant, and the dielectric loss factor were 29 μC/cm 2 , 38 kV/cm, 1030, and 0.05, respectively. The surface of the stainless steel sheets, directly deposited with PZT thick films and annealed with CO 2 laser irradiation, retained the brilliance of bare material in spite of thermal heating.

Effect of diode laser irradiation on ferroelectrics properties of PZT fimls produced by aerosol depositon method

Lead zirconate titanate (PZT) films were produced on stainless steel substrate by the aerosol deposition method (ADM) using a PZT submicron-size particle beam. In the ADM, when the PZT submicron-size particles impact with the substrate, the particles form a film. To modify their primary ferroelectrics properties, the films were irradiated with a diode laser. When the scanning velocity of the laser spot on the films were decreased from 6 mm/s to 1 mm/s, laser intensity was increased from 110 W/cm2 to 670 W/cm2. Dielectric constant and the value of remanent polarization were improved by the laser irradiation. When the improvements of the properties were performed, the substrates were not damaged.Lead zirconate titanate (PZT) films were produced on stainless steel substrate by the aerosol deposition method (ADM) using a PZT submicron-size particle beam. In the ADM, when the PZT submicron-size particles impact with the substrate, the particles form a film. To modify their primary ferroelectrics properties, the films were irradiated with a diode laser. When the scanning velocity of the laser spot on the films were decreased from 6 mm/s to 1 mm/s, laser intensity was increased from 110 W/cm2 to 670 W/cm2. Dielectric constant and the value of remanent polarization were improved by the laser irradiation. When the improvements of the properties were performed, the substrates were not damaged.