Soo Deok Han

Chemiresistive Electronic Nose toward Detection of Biomarkers in Exhaled Breath

Detection of gas-phase chemicals finds a wide variety of applications, including food and beverages, fragrances, environmental monitoring, chemical and biochemical processing, medical diagnostics, and transportation. One approach for these tasks is to use arrays of highly sensitive and selective sensors as an electronic nose. Here, we present a high performance chemiresistive electronic nose (CEN) based on an array of metal oxide thin films, metal-catalyzed thin films, and nanostructured thin films. The gas sensing properties of the CEN show enhanced sensitive detection of H2S, NH3, and NO in an 80% relative humidity (RH) atmosphere similar to the composition of exhaled breath. The detection limits of the sensor elements we fabricated are in the following ranges: 534 ppt to 2.87 ppb for H2S, 4.45 to 42.29 ppb for NH3, and 206 ppt to 2.06 ppb for NO. The enhanced sensitivity is attributed to the spillover effect by Au nanoparticles and the high porosity of villi-like nanostructures, providing a large surface-to-volume ratio. The remarkable selectivity based on the collection of sensor responses manifests itself in the principal component analysis (PCA). The excellent sensing performance indicates that the CEN can detect the biomarkers of H2S, NH3, and NO in exhaled breath and even distinguish them clearly in the PCA. Our results show high potential of the CEN as an inexpensive and noninvasive diagnostic tool for halitosis, kidney disorder, and asthma.

Highly Sensitive H2S Sensor Based on the Metal-Catalyzed SnO2 Nanocolumns Fabricated by Glancing Angle Deposition

As highly sensitive H2S gas sensors, Au- and Ag-catalyzed SnO2 thin films with morphology-controlled nanostructures were fabricated by using e-beam evaporation in combination with the glancing angle deposition (GAD) technique. After annealing at 500 °C for 40 h, the sensors showed a polycrystalline phase with a porous, tilted columnar nanostructure. The gas sensitivities (S = Rgas/Rair) of Au and Ag-catalyzed SnO2 sensors fabricated by the GAD process were 0.009 and 0.015, respectively, under 5 ppm H2S at 300 °C, and the 90% response time was approximately 5 s. These sensors showed excellent sensitivities compared with the SnO2 thin film sensors that were deposited normally (glancing angle = 0°, S = 0.48).

Highly Sensitive Sensors Based on Metal-Oxide Nanocolumns for Fire Detection

A fire detector is the most important component in a fire alarm system. Herein, we present the feasibility of a highly sensitive and rapid response gas sensor based on metal oxides as a high performance fire detector. The glancing angle deposition (GLAD) technique is used to make the highly porous structure such as nanocolumns (NCs) of various metal oxides for enhancing the gas-sensing performance. To measure the fire detection, the interface circuitry for our sensors (NiO, SnO2, WO3 and In2O3 NCs) is designed. When all the sensors with various metal-oxide NCs are exposed to fire environment, they entirely react with the target gases emitted from Poly(vinyl chlorides) (PVC) decomposed at high temperature. Before the emission of smoke from the PVC (a hot-plate temperature of 200 °C), the resistances of the metal-oxide NCs are abruptly changed and SnO2 NCs show the highest response of 2.1. However, a commercial smoke detector did not inform any warning. Interestingly, although the NiO NCs are a p-type semiconductor, they show the highest response of 577.1 after the emission of smoke from the PVC (a hot-plate temperature of 350 °C). The response time of SnO2 NCs is much faster than that of a commercial smoke detector at the hot-plate temperature of 350 °C. In addition, we investigated the selectivity of our sensors by analyzing the responses of all sensors. Our results show the high potential of a gas sensor based on metal-oxide NCs for early fire detection.

Metal Oxide Nanocolumns for Extremely Sensitive Gas Sensors

Highly ordered SnO2 and NiO nanocolumns have been successfully achieved by glancing-angle deposition (GLAD) using an electron beam evaporator. Nanocolumnar SnO2 and NiO sensors exhibited high performance owing to the porous nanostructural effect with the formation of a double Schottky junction and high surface-to-volume ratios. When all gas sensors were exposed to various gases such as C2H5OH, C6H6, and CH3COCH3, the response of the highly ordered SnO2 nanocolumn were over 50 times higher than that of the SnO2 thin film. This work will bring broad interest and create a strong impact in many different fields owing to its particularly simple and reliable fabrication process.

Laser-irradiated inclined metal nanocolumns for selective, scalable, and room-temperature synthesis of plasmonic isotropic nanospheres

Plasmonic nanocrystals, which exhibit extraordinary optical properties, are challenging to grow in selective positions with a cost-effective and high-throughput process. We demonstrate that plasmonic isotropic gold nanospheres (AuNSs) can be selectively synthesized on wafer-scale rigid and flexible substrates at room temperature by laser irradiation. First, we prepare gold nanocolumn (AuNC) thin films on sapphire and polydimethylsiloxane substrates with glancing angle deposition (GAD). Then, a KrF excimer laser is exposed at selected positions with a 24 ns pulse duration. Finally, highly isotropic AuNSs as plasmonic nanocrystals are synthesized at the targeted positions. We suggest that the formation of such isotropic AuNSs is caused by reshaping from the top of the AuNCs; this is verified by the temperature distribution in the AuNCs during laser irradiation through finite element method simulations. We further investigate the formation of AuNSs by varying the laser energy density and the kind of substrate. By using a simple mask process, we demonstrate patterning of the letters “KIST” via selectively grown AuNSs on a flexible substrate. The simple laser irradiation process on GAD-grown metal NC thin films is expected to be a promising method for scalable synthesis of plasmonic isotropic NSs at targeted positions with a rapid process and at room temperature.

Chemiresistive Sensor Array Based on Semiconducting Metal Oxides for Environmental Monitoring

We present gas sensing performance based on 22 sensor array with four different elements (TiO2, SnO2, WO3 and In2O3 thin films) fabricated by rf sputter. Each thin film was deposited onto the selected SiO2/Si substrate with Pt interdigitated electrodes (IDEs) of 5 m spacing which were fabricated on a SiO2/Si substrate using photolithography and dry etching. For 5 ppm NO2 and 50 ppm CO, each thin film sensor has a different response to offers the distinguishable response pattern for different gas molecules. Compared with the conventional micro-fabrication technology, 22 sensor array with such remarkable response pattern will be open a new foundation for monolithic integration of high-performance chemoresistive sensors with simplicity in fabrication, low cost, high reliablity, and multi- functional smart sensors for environmental monitoring.

Chemiresistive Sensor Based on One-Dimensional WO 3 Nanostructures as Non-Invasive Disease Monitors

Abstract In this study, a chemiresistive sensor based on one-dimensional WO 3 nanostructures is presented for application in non-invasive med-ical diagnostics. WO 3 nanostructures were used as an active gas sensing layer and were deposited onto a SiO 2 /Si substrate using Pt inter-digitated electrodes (IDEs). The IDE spacing was 5µm and deposition was performed using RF sputter with glancing angle depositionmode. Pt IDEs fabricated by photolithography and dry etching. In comparison with thin film sensor, sensing performance of nano-structure sensor showed an enhanced response of more than 20 times when exposed to 50 ppm acetone at 400°C. Such a remarkablefaster response can pave the way for a new generation of exhaled breath analyzers based on chemiresistive sensors which are les s expen-sive, more reliable, and less complicated to be manufactured. Moreover, presented sensor technology has the potential of being usedas a personalized medical diagnostics tool in the near future. Keywords: Metal oxide gas sensors, Chemiresistive sensor, Exhaled breath analyzer, One-dimensional WO