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Stefan Kempf

Singulus Technologies

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Publication

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Archive | 1994

Apparatus for the transfer of substrates

Stefan Kempf; Eggo Sichmann

Archive | 1997

Device for gripping and holding substrates

Stefan Kempf; Michael Reising

Archive | 1994

Device for transporting substrates

Stefan Kempf; Eggo Sichmann

Archive | 1998

Device and method for transporting separate substrates

Stefan Kempf

Archive | 1994

Vorrichtung für den Transport von Substraten

Stefan Kempf; Eggo Sichmann

Archive | 1997

Device for gripping, holdings and/or transporting substrates

Stefan Kempf; Eggo Sichmann

Archive | 1993

Cathodic sputtering device

Eggo Sichmann; Stefan Kempf; Michael Koenig

Archive | 1996

Apparatus for holding and transporting circular substrates around multifunctional work station

Stefan Kempf; Eggo Sichmann

Archive | 1998

Venting system for vacuum processing especially sputtering chamber

Stefan Kempf; Michael Reising

Archive | 1999

Arrangement for drying substrates has movable closure devices for deflecting air flow in annular chamber so it is kept away from loading and unloading station

Stefan Kempf; Michael Reising; Karl Schmitt

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