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Stefan Kluge

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Publication

Featured researches published by Stefan Kluge.

Archive | 1998

Method for producing a micromembrane pump body

Reinhard Linnemann; Martin Richter; Stefan Kluge; Peter Woias

Archive | 1997

Piezo-electric operated microvalve

Stefan Kluge; Peter Woias

Archive | 1997

Piezoelektrisch betätigtes mikroventil

Stefan Kluge; Peter Woias

Archive | 1999

Micromechanical actuator structure and microvalve

Stefan Kluge; Andreas Schmid; Peter Woias

Archive | 1998

Pompe a micromembrane

Stefan Kluge; Reinhard Linnemann; Martin Richter; Peter Woias

Archive | 1998

Mikromechanische Aktorstruktur und Mikroventil Micromechanical actuator structure and microvalves

Stefan Kluge; Peter Woias; Andreas Schmid

Archive | 1997

Mikromembranpumpe Micro-diaphragm pump

Reinhard Linnemann; Martin Richter; Stefan Kluge; Peter Woias

Archive | 1997

Piezoelektrisch betätigtes Mikroventil Piezoelectric actuated microvalve

Stefan Kluge; Peter Woias

Archive | 1997

Piezoelectric actuated microvalve

Stefan Kluge; Peter Woias

Archive | 1997

Verfahren zum Herstellen eines Mikromembranpumpenkörpers A method of manufacturing a micro-diaphragm pump body

Reinhard Linnemann; Martin Richter; Stefan Kluge; Peter Woias

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Peter Woias

University of Freiburg

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