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Stefan Lanio

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Publication

Featured researches published by Stefan Lanio.

Archive | 2005

High current density particle beam system

Juergen Frosien; Stefan Lanio; Gerald Schoenecker; Alan D. Brodie; David A. Crewe

Archive | 2004

Charged Particle Beam Device with Aperture

Juergen Frosien; Stefan Lanio; Helmut Banzhof

Archive | 2006

Analyzing system and charged particle beam device

Juergen Frosien; Stefan Lanio

Archive | 2006

Analysis system and charged particle beam device

Juergen Frosien; Stefan Lanio; ラニオ ステファン; フロシエン ユルゲン

Archive | 1992

Scanning electron beam appts. esp. electron beam test device or scanning electron microscope - has deflector for secondary electron beam in form of electrostatic mirror and detects secondary beam using spectrometer

Karl Heinz Prof Dr Re Herrmann; Steffen Beck; Hans Peter Feuerbaum; Juergen Dr Frosien; Stefan Lanio; Gerold Schoenecker; Andreas Benez

Archive | 2010

Electron beam device with dispersion compensation, and method of operating same

Stefan Lanio; Gerald Schoenecker

Archive | 2001

Particle beam system

Stefan Lanio; Juergen Frosien

Archive | 2009

ACHROMATIC BEAM DEFLECTOR, ACHROMATIC BEAM SEPARATOR, CHARGED PARTICLE DEVICE, METHOD OF OPERATING AN ACHROMATIC BEAM DEFLECTOR, AND METHOD OF OPERATING AN ACHROMATIC BEAM SEPARATOR

Gerald Schoenecker; Stefan Lanio

Archive | 2015

Charged particle device with an achromatic beam deflector, or an achromatic beam separator, and method of operating

Gerald Schoenecker; Stefan Lanio

Archive | 2011

ELECTRON BEAM APPARATUS WITH DISPERSION COMPENSATION AND METHOD

Stefan Lanio; Gerald Schoenecker

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Collaboration

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Juergen Frosien

Siemens

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Helmut Banzhof

Applied Materials

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Juergen Frosien

Siemens

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