Steffen Schott

Advanced on-wafer multiport calibration methods for mono- and mixed-mode device characterization

AbstmcI-Thk paper outlines the theoretical backgmund and the results of advanced RF calibration pmcedures specially suited to support wafer level RF device characterization with monoandlor mixed-mode interfaces. The analysis of on-wafer measumment systems bring up the benefits of using load standards, reflectometers, as well as the GSOLT-model to perform high quality device characterizations. Based on the large uomher of possible methods to combine two-port calibration algorithms with multiport techniques, two methods were derived and investigated focusing on on-wafer devices. The mults of our experiments demonstrate the effectiveness of novel RRMT onwafer Calibration method for multiport devices.

A robust broadband calibration method for wafer-level characterization of multiport devices

This paper describes the theory and practical results of the new multiport calibration procedure especially suited for wafer-level device characterization over a wide frequency range. An analysis of the currently available multiport calibration approaches was carried out. The advantages and drawbacks of each approach are demonstrated. It is shown that a robust wafer-level multiport calibration procedure should combine the strengths of both 7-term and 10-term based algorithms. It should also provide reference-match measurements on each VNA measurement port and be insensitive to the behavior of highly-reflective standards and the design of transmission standards. Corresponding to these requirements, the definition of the advanced multiport RRMT+ algorithm is given. The results of a practical experiment proved the theory and demonstrated the advantages of the new multiport RRMT+ calibration procedure.

Novel concept for a dual on wafer probe tip and corresponding calibration techniques

The paper discusses a revolutionary design concept for a dual RFIC wafer probe and corresponding calibration substrates (CSR) which demonstrate perfect symmetrical behavior. The probe makes it possible to achieve the same behavior standard as a single transmission line design. This paper explains the novel design approach and illustrates the quality of the design up to 40 GHz.