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Stephen A. Rishton

Applied Materials

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Publication

Featured researches published by Stephen A. Rishton.

Archive | 1999

Method and apparatus that determines charged particle beam shape codes

Stephen A. Rishton; Weidong Wang; Volker Boegli; Ulrich Hofmann

Archive | 1999

RASTER SHAPED BEAM, ELECTRON BEAM EXPOSURE STRATEGY USING A TWO DIMENSIONAL MULTIPIXEL FLASH FIELD

Stephen A. Rishton; Jeffery K. Varner; Allan L. Sagle; Lee H. Veneklasen; Weidong Wang

Archive | 1999

Apparatus and method for controlling a beam shape

Volker Boegli; Stephen A. Rishton; Lee H. Veneklasen

Archive | 2003

Technique for writing with a raster scanned beam

Mary Veneklasen; Stephen A. Rishton; Stacey J. Winter; Volker Boegli; Huei Mei Kao

Archive | 2005

A METHOD AND APPARATUS THAT DETERMINES CHARGED PARTICLE BEAM SHAPE CODES IN LITHOGRAPHY SYSTEMS

Stephen A. Rishton; Weidong Wang; Volker Boegli; Ulrich Hofmann

Archive | 2003

Verfahren zum schreiben mittels gerastetem strahls

Volker Boegli; Huei Mei Kao; Stephen A. Rishton; Mary Veneklasen; Stacey J. Winter

Archive | 2000

Verfahren und vorrichtung zur festlegung der formeinkodierung einen ladungsträgerstrahls

Volker Boegli; Ulrich Hofmann; Stephen A. Rishton; Weidong Wang

Archive | 1999

AN APPARATUS AND METHOD FOR CONTROLLING A BEAM SHAPE IN LITHOGRAPHIY SYSTEMS

Volker Boegli; Stephen A. Rishton; Lee H. Veneklasen

Archive | 1999

Gerasterter strahl, elektonenstrahl-schreibstrategie mittels zweidimensionaler mehrpixel-belichtungsfeld

Stephen A. Rishton; Jeffrey K. Varner; Allan L. Sagle; Lee H. Veneklasen; Weidong Wang

Archive | 1999

Faisceau a balayage trame, strategie d'exposition a un faisceau electronique dans laquelle un champ de flash multipixel bidimensionnel est utilise

Stephen A. Rishton; Jeffrey K. Varner; Allan L. Sagle; Lee H. Veneklasen; Weidong Wang

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Lee H. Veneklasen

Applied Materials

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Volker Boegli

Applied Materials

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Weidong Wang

Applied Materials

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Allan L. Sagle

Applied Materials

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Jeffrey K. Varner

Applied Materials

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Ulrich Hofmann

Applied Materials

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Huei Mei Kao

Applied Materials

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Mary Veneklasen

Applied Materials

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Stacey J. Winter

Applied Materials

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Jeffery K. Varner

Applied Materials

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