Stephen P. Maki

Visual indicator for trace organic volatiles.

We describe herein a novel approach for visual indication of trace organic vapors. The sensor utilizes a microporous material within a visual thin film transducer to produce changes in color upon exposure to a very wide range of volatile organic compounds. Visual indication at 5 parts per million (ppm) is demonstrated, with optoelectronic detection achieved to below 50 parts per billion (ppb). Through a thoughtful design of the sensor, we are able to avoid interference from water vapor, a critical attribute needed for practical application.

Hybrid Dielectric Thin Films on Flexible Substrates for Embedded Capacitor Applications

This paper describes a novel fabrication process and technology for making hybrid thin film capacitors on flexible metallic substrates using vapor deposition process (polymer multilayer) and RF sputtering. In this case, polymeric acrylate thin films are deposited on flexible base metal foils (Cu) using a vapor deposition process followed by inorganic yttria stabilized zirconia thin films by RF sputtering for embedded capacitor and energy storage applications. This hybrid thin film approach exhibits a high yield of functional capacitors with high capacitance density values, low dielectric loss, and excellent insulating properties. This technique provides a huge improvement in the device yield and does not require sophisticated deposition equipment or a clean room environment or any kind of surface cleaning treatment of substrates and can potentially be adopted in a roll-to-roll industrial manufacturing process.