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Dive into the research topics where Steven Edward Staller is active.

Publication


Featured researches published by Steven Edward Staller.


Archive | 1999

MEMS sensor structure and microfabrication process therefor

John C. Christenson; Steven Edward Staller; John E. Freeman; Troy A. Chase; Robert Lawrence Healton; David B. Rich


Archive | 1996

Method for making an all-silicon capacitive pressure sensor

Douglas Ray Sparks; William J. Baney; Steven Edward Staller; Dan W. Chilcott; James Werstler Siekkinen


Archive | 1995

All-silicon monolithic motion sensor with integrated conditioning circuit

Peter J. Schubert; Steven Edward Staller; Dan W. Chilcott; Mark Billings Kearney


Archive | 1999

Method and apparatus for electrically testing and characterizing formation of microelectric features

John C. Christenson; Steven Edward Staller; John E. Freeman; Troy A. Chase; Robert Lawrence Healton


Archive | 2000

Process for verifying a hermetic seal and semiconductor device therefor

Steven Edward Staller


Archive | 2003

Semiconductor device with means for verifying a hermetic seal therefor

Steven Edward Staller


Archive | 1996

Monolithischer Ganzsiliziumbewegungsfühler mit integrierter Umsetzschaltung

Peter J. Schubert; Steven Edward Staller; Dan W. Chilcott; Mark Billings Kearney


Archive | 2007

Method of aligning mask layers to buried features

John E. Freeman; Steven Edward Staller; Troy A. Chase


Archive | 2012

ATOMIC LEVEL BONDING FOR ELECTRONICS PACKAGING

Ralph S. Taylor; Steven Edward Staller


International Symposium on Microelectronics | 2012

Thin-film High Voltage Capacitors for Hybrid Electric Vehicle Inverter Applications

M. Ray Fairchild; Carl W. Berlin; Dwadasi H.R. Sarma; Ralph S. Taylor; Han S. Lee; Steven Edward Staller

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