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Steven K. Grumbine

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Publication

Featured researches published by Steven K. Grumbine.

Archive | 2003

Method of polishing a multi-layer substrate

Shumin Wang; Vlasta Brusic Kaufman; Steven K. Grumbine; Isaac K. Cherian; Renjie Zhou

Archive | 2008

Polishing composition and method utilizing abrasive particles treated with an aminosilane

Jeffrey Dysard; Sriram Anjur; Steven K. Grumbine; Daniela White; William Ward

Archive | 2000

Polishing system and method of its use

Shumin Wang; Steven K. Grumbine; Isaac K. Cherian; Vlasta Brusic Kaufman; Renjie Zhou

Archive | 2000

Polishing system with stopping compound and method of its use

Shumin Wang; Vlasta Brusic Kaufman; Steven K. Grumbine; Isaac K. Cherian

Archive | 2001

Polishing pad comprising particles with a solid core and polymeric shell

Isaac K. Cherian; Sriram P. Anjur; Steven K. Grumbine

Archive | 2009

Barrier slurry for low-k dielectrics

Shoutian Li; Steven K. Grumbine; Jeffrey Dysard; Pankaj Singh

Archive | 2009

Slurry composition containing non-ionic polymer and method for use

Steven K. Grumbine; Chul Woo Nam; William Ward; Ramasubramanyam Nagarajan

Archive | 2005

Polymeric inhibitors for enhanced planarization

Renjie Zhou; Steven K. Grumbine; Jian Zhang; Isaac K. Cherian

Archive | 2010

Self-cleaning wiresaw apparatus and method

Steven K. Grumbine; Carlos Barros; Ramasubramanyam Nagarajan

Archive | 2008

Composition à polir et procédé utilisant des particules abrasives traitées au moyen d'un aminosilane

Sriram Anjur; Jeffrey Dysard; Steven K. Grumbine; William Ward; Daniela White

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Shumin Wang

Cabot Corporation

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