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Sugawara Takuya

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Publication

Featured researches published by Sugawara Takuya.

Archive | 2008

MATERIAL FOR ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING IT

Sugawara Takuya; Ozaki Akinori; Sasaki Masaru

Archive | 2007

METHOD OF MANUFACTURING ELECTRON DEVICE MATERIAL

Sugawara Takuya; Nakanishi Toshio; Ozaki Akinori; Matsuyama Seiji; Murakawa Emi; Tada Yoshihide

Archive | 2008

Insulating film forming method

Sugawara Takuya; Tada Yoshihide; Nakamura Motoshi; Ozaki Akinori; Nakanishi Toshio; Sasaki Masaru; Matsuyama Seiji

Archive | 2009

Method of manufacturing electronic device material

Sugawara Takuya; Nakanishi Toshio; Ozaki Akinori; Matsuyama Seiji; Murakawa Emi; Tada Yoshihide

Archive | 2007

METHOD FOR PRODUCING MATERIAL OF ELECTRONIC DEVICE AND METHOD FOR PLAZA PROCESSING

Sugawara Takuya; Nakanishi Toshio; Ozaki Shigenori; Matsuyama Seiji; Murakawa Shigemi; Tada Yoshihide

Archive | 2007

SUBSTRATE PROCESSING DEVICE AND METHOD OF THE SAME

Sugawara Takuya; Matsuyama Seiji; Sasaki Masaru

Archive | 2006

METHOD OF PROCESSING A SUBSTRATE

Sugawara Takuya; Nakanishi Toshio; Ozaki Shigenori; Matsuyama Seiji; Murakawa Shigemi; Tada Yoshihide

Archive | 2011

VERFAHREN ZUR HERSTELLUNG VON ELEKTRONIKBAUTEILMATERIAL

Sugawara Takuya; Nakanishi Toshio; Ozaki Shigenori; Matsuyama Seiji; Murakawa Shigemi; Tada Yoshihide

Archive | 2006

METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, METHOD FOR PLAZMA PROCESSING, AND METHOD FOR FORMING GATE INSULATING FILM

Sugawara Takuya; Nakanishi Toshio; Ozaki Shigenori; Matsuyama Seiji; Murakawa Shigemi; Tada Yoshihide

Archive | 2006

METHOD FOR MODIFYING INSULATION FILM

Sugawara Takuya; Tada Yoshihide; Nakamura Genji; Ozaki Shigenori; Nakanishi Toshio; Sasaki Masaru; Matsuyama Seiji; Hasebe Kazuhide; Nakajima Shigeru; Fujiwara Tomonori

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