Is this you? Create Your Porfile
Avatar

Sumi Tanaka

Tokyo Electron

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Sumi Tanaka is active.

Explore More

Publication

Featured researches published by Sumi Tanaka.

Archive | 2005

Substrate supporting structure for semiconductor processing, and plasma processing device

Taro Ikeda; Sumi Tanaka; Kaoru Yamamoto

Archive | 1994

Film deposition processing device having transparent support and transfer pins

Sumi Tanaka; Yuichiro Fujikawa; Tomihiro Yonenaga; Hideki Lee

Archive | 1996

Film deposition apparatus with anti-adhesion film and chamber cooling means

Tomihiro Yonenaga; Mitsuhiro Tachibana; Sumi Tanaka

Archive | 1988

Carrier for transferring plate-like objects one by one, a handling apparatus for loading or unloading the carrier, and a wafer probing machine fitted with the handling apparatus for the wafer carrier

Hisashi Koike; Sumi Tanaka

Archive | 2003

Gas supply system and treatment system

Shigeru Kasai; Sumi Tanaka; Tetsuya Saito; Norihiko Yamamoto; Kenichi Yanagitani

Archive | 2005

Gas processing apparatus and method and computer storage medium storing program for controlling same

Shigeru Kasai; Seiji Ishibashi; Kaoru Yamamoto; Sumi Tanaka; Kenichi Yanagitani

Archive | 2003

Gas supply system and processing system

Shigeru Kasai; Sumi Tanaka; Tetsuya Saito; Norihiko Yamamoto; Kenichi Yanagitani

Archive | 1990

Electric probing test machine

Tadashi Obikane; Hisashi Koike; Sumi Tanaka

Archive | 2012

Microwave irradiation apparatus

Shigeru Kasai; Ryoji Yamazaki; Mitsutoshi Ashida; Yuji Obata; Sumi Tanaka

Archive | 2010

Loading table structure and processing device

Sumi Tanaka; Tomohito Komatsu; Hiroo Kawasaki

Explore More

Collaboration

Dive into the Sumi Tanaka's collaboration.

Top Co-Authors
Avatar

Shigeru Kasai

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Kenichi Yanagitani

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Munehisa Futamura

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Norihiko Yamamoto

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Tetsuya Saito

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Hiroo Kawasaki

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Hisashi Koike

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Kaoru Yamamoto

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Kouki Suzuki

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Masamichi Nomura

Tokyo Electron

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge