Susan Mcgee
Philips
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Publication
Featured researches published by Susan Mcgee.
Thin Solid Films | 1989
Mali Venkatesan; Susan Mcgee; Uday Mitra
Abstract The use of sputtered indium tin oxide (ITO) thin films as metal layers in silicon-based electronic circuits has been investigated. The ITO films were sputtered directly from In 2 O 3 /SnO 2 targets under inert ambient in an r.f. sputtering system. The films were characterized as functions of process parameters such as r.f. power, substrate temperature and post-deposition annealing treatments. The properties studied included sheet resistance, transparency, thickness uniformity, composition and structure, step coverage, and etchability. In addition, the suitability of these ITO films as interconnects in microelectronic devices was examined by fabricating MOSFET devices using fine line patterned ITO for the metallization.
Archive | 1990
Hemant S. Betrabet; Otmar Boser; Robert H. Kane; Susan Mcgee; Thomas Caulfield
Archive | 1995
Vivek Mehrotra; Thomas McGee; Susan Mcgee; Jeroen Langevoort; Edward Willem Albert Young
Archive | 1997
Vivek Mehrotra; Hemant S. Betrabet; David R. Woodward; Thomas O. Leyh; Susan Mcgee
Archive | 1998
Vivek Mehrotra; Hemant S. Betrabet; Susan Mcgee; Thomas McGee
Archive | 1996
Hui-Meng Chow; Jose Azevedo; Susan Mcgee
Archive | 1994
Vivek Mehrotra; Hemant S. Betrabet; Susan Mcgee; Thomas McGee
Archive | 1997
Jose Azevedo; Hui-Meng Chow; Susan Mcgee
Archive | 1991
Hemant S. Betrabet; Otmar Boser; Robert H. Kane; Susan Mcgee; Thomas Caulfield
Archive | 1991
Hemant S. Betrabet; Otmar Boser; Robert H. Kane; Susan Mcgee; Thomas Caulfield
