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Sven Lindfors

ASM International

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Publication

Featured researches published by Sven Lindfors.

Archive | 2001

Method for growing thin films

Tuomo Suntola; Sven Lindfors

Archive | 2000

Method and apparatus for growing thin films

Tuomo Suntola; Sven Lindfors

Archive | 2004

Showerhead assembly and ALD methods

Sven Lindfors; Pekka J. Soininen

Archive | 2001

Method and apparatus of growing a thin film onto a substrate

Sven Lindfors

Archive | 2002

Method and apparatus of growing a thin film

Sven Lindfors; Ivo Raaijmakers

Archive | 2001

ALD reactor and method with controlled wall temperature

Niklas Bondestam; Sven Lindfors

Archive | 2003

Method and apparatus for depositing thin films on a surface

Pekka J. Soininen; Sven Lindfors

Archive | 2000

Method for removing substances from gases

Sven Lindfors; Jaakko Hyvarinen

Archive | 2008

Method and apparatus for removing substances from gases

Sven Lindfors; Jaakko Hyvarinen

Archive | 2002

Ald device and ald method

Niklas Bondestam; Sven Lindfors; ニクラス ボンデスタム; スヴェン リンドフォルス

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Collaboration

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Tuomo Suntola

ASM International

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Jaakko Hyvarinen

ASM International

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Niklas Bondestam

ASM International

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Pekka J. Soininen

ASM International

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Ivo Raaijmakers

ASM International

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