T. Beutel

A Long Stroke Electromagnetic

In this paper, a Lorentz force-based <formula formulatype=inline><tex Notation=TeX>

XY

XY

Positioning Stage for Micro Applications

</tex></formula> positioning stage with a stack of four electromagnetic linear motors in parallel configuration is presented. The overall design of the positioning stage consists of a mobile and a fixed part separated using a four-point contact technique. The uniqueness of the proposed positioning stage lies in its light design with the ability to perform variable strokes at short <formula formulatype=inline><tex Notation=TeX>

Silicon conveyor based planar electromagnetic device for linear displacement

(< 100 mu

Design of a high-lift experiment in water including active flow control

</tex></formula>m) and long range (millimeter level) with preembedded auto guidance feature. The analytical modeling and experiment have been realized. The open- and closed-loop performance of positioning stage in linear and nonlinear trajectories have been tested and good agreement is observed between experimental and analytical results. The positioning stage is able to perform variable strokes up till 2 mm in the <formula formulatype=inline><tex Notation=TeX>

Cell Manipulation System Based on a Self-Calibrating Silicon Micro Force Sensor Providing Capillary Status Monitoring

xy

Cell manipulation system based on a silicon micro force sensor with self-calibration from backside

</tex></formula> plane. In closed loop, the maximum precision errors in short and long strokes are found to be 0.031 and 0.451xa0μm, respectively. The maximum travel speed is 12 mm/s in open loop.

Flexible hot-film anemometer arrays for flow measurements on curved structures

In this work a planar electromagnetic motion device is presented for linear displacement. The motion forces are generated by the interaction between the currents in planar electrical drive coil, placed beneath the adjacently inverted magnets array with an insulating glass layer of 170 µm thickness in between. To achieve linear displacement in a plane, four adjacently inverted magnets arrays are assembled orthogonally to a micro-fabricated silicon cross structure and four planar electrical drive coils are assembled in an aluminum platform. The first prototype of this planar device is able to perform linear displacement in XY-plane with a positional repeatability error of 2.54 µm and 1.32 µm along X- and Y-axis respectively. The device is able to perform in free and self guided mode with a straightness error of 15.13 ± 5.64 µm and 3.02 ± 1.69 µm respectively.

Robust pressure sensor for measurements in boundary layers of liquid fluids with medium total pressures

This paper describes the structural design of an active flow-control experiment. The aim of the experiment is to investigate the increase in efficiency of an internally blown Coanda flap using unsteady blowing. The system uses tailor-made microelectromechanical (MEMS) pressure sensors to determine the state of the oncoming flow and an actuated lip to regulate the mass flow and velocity of a stream near a wall over the internally blown flap. Sensors and actuators are integrated into a highly loaded system that is extremely compact. The sensors are connected to a bus system that feeds the data into a real-time control system. The piezoelectric actuators using the d 33 effect at a comparable low voltage of 120 V are integrated into a lip that controls the blowout slot height. The system is designed for closed-loop control that efficiently avoids flow separation on the Coanda flap. The setup is designed for water-tunnel experiments in order to reduce the free-stream velocity and the systems control frequency by a factor of 10 compared with that in air. This paper outlines the function and verification of the systems main components and their development.

Flexible hot-film anemometer arrays on curved structures for active flow control on airplane wings

In this paper, a system for cell manipulation is presented. A two axis stage is arranged on an inverted microscope to place cells in focus. Cell manipulation can thereby be observed while the system automatically runs force controlled measurements. A high precision linear motor moves a force sensor, which has been equipped with a stimulation tool, e.g., a micro capillary for cell injection. The sensor is made up of silicon and consists of a membrane with a boss structure, which enables measurements as low as 120 <formula formulatype=inline><tex Notation=TeX>