T. L. Dull

Determination of pore-size distribution in low-dielectric thin films

Positronium annihilation lifetime spectroscopy is used to determine the pore-size distribution in low-dielectric thin films of mesoporous methylsilsesquioxane. A physical model of positronium trapping and annihilating in isolated pores is presented. The systematic dependence of the deduced pore-size distribution on pore shape/dimensionality and sample temperature is predicted using a simple quantum mechanical calculation of positronium annihilation in a rectangular pore. A comparison with an electron microscope image is presented.

Probing diffusion barrier integrity on porous silica low-k thin films using positron annihilation lifetime spectroscopy

The technique of positron annihilation lifetime spectroscopy (PALS) has been used to investigate the continuity and thermal stability of thin barrier layers designed to prevent Cu atom diffusion into porous silica, low-dielectric constant (k) films. Nanoglass™ K2.2-A10C (A10C), a porous organosilicate film, is determined to have interconnected pores with an average tubular-pore diameter of (6.9 ± 0.4) nm. Cu deposited directly on the A10C films is observed to diffuse into the porous structure. The minimum necessary barrier thickness for stable continuity of Ta and TaN layers deposited on A10C is determined by detecting the signal of positronium (Ps) escaping into vacuum. It is found that the 25 nm thick layers do not form continuous barriers. This is confirmed by the presence of holes observed in such films using a transmission electron microscope. Although 35 nm and 45 nm Ta and TaN layers perform effectively at room temperature as Ps barriers, only the Ta-capped samples are able to withstand heat treatm...

Probing Pore Characteristics in Low-K Thin Films Using Positronium Annihilation Lifetime Spectroscopy

Depth profiled positronium annihilation lifetime spectroscopy (PALS) has been used to probe the pore characteristics (size, distribution, and interconnectivity) in thin, porous films, including silica and organic-based films. The technique is sensitive to all pores (both interconnected and closed) in the size range from 0.3 nm to 300 nm, even in films buried under a diffusion barrier. PALS may be particularly useful in deducing the pore-size distribution in closed-pore systems where gas absorption methods are not available. In this technique a focussed beam of several keV positrons forms positronium (Ps, the electron-positron bound state) with a depth distribution that depends on the selected positron beam energy. Ps inherently localizes in the pores where its natural (vacuum) annihilation lifetime of 142 ns is reduced by collisions with the pore surfaces. The collisionally reduced Ps lifetime is correlated with pore size and is the key feature in transforming a Ps lifetime distribution into a pore size distribution. In thin silica films that have been made porous by a variety of methods the pores are found to be interconnected and an average pore size is determined. In a mesoporous methyl-silsesquioxane film with nominally closed pores a pore size distribution has been determined. The sensitivity of PALS to metal overlayer interdiffusion is demonstrated. PALS is a non-destructive, depth profiling technique with the only requirement that positrons can be implanted into the porous film where Ps can form.

A positron-emitting internal marker for identification of normal tissue by positron emission tomography: Phantom studies and validation in patients

PURPOSE This study evaluated in a phantom model and verified in patients with lung cancer whether the use of an internal positron-emitting labeled marker could localize a critical structure by positron emission tomography (PET) imaging and verify multimodality image registration. MATERIALS AND METHODS An initial device and method were developed to demonstrate by dedicated PET the location of the normal esophagus in a phantom and in three patients using a column of 2-deoxy-2-[18F]fluoro-D-glucose (FDG) solution between proximal and distal gas phases in polyurethane tubing. The device was assessed for possible loss of radioactivity. PET, CT and PET-CT fusion imaging followed. RESULTS X-rays of the marker device showed a continuous fluid column. No leakage of contents was detected. The internal marker in the phantom and in patients allowed visualization by PET of the esophagus, and verified an image registration algorithm. CONCLUSIONS A positron-emitting internal marker was constructed, demonstrated to retain tracer, and shown to be capable of verifying an image registration algorithm and identifying a critical structure, the esophagus, by PET in a phantom and in patients.

An overview of the Michigan Positron Microscope Program

An overview of the Michigan Positron Microscope Program is presented with particular emphasis on the second generation microscope that is presently near completion. The design and intended applications of this microscope will be summarized.

Doppler broadening spectroscopy studies of CoSi2 films

Doppler Broadening Spectroscopy (DBS) has been employed to study the growth of Co silicide films. Depth-profiled DBS confirms the conclusion from an earlier reemitted positron study that the short positron diffusion length in these films is primarily due to defect trapping in the film and that interfacial trapping does not play a significant role. The interesting possibility that positrons might be trapping in the positron well formed by the electronic Schottky barrier cannot account for the observed short diffusion length.