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Featured researches published by T. Onuma.


Applied Physics Letters | 2010

Nitrogen doped MgxZn1−xO/ZnO single heterostructure ultraviolet light-emitting diodes on ZnO substrates

Ken Nakahara; Shunsuke Akasaka; Hiroyuki Yuji; Kentaro Tamura; Tetsuo Fujii; Yoshio Nishimoto; Daiju Takamizu; A. Sasaki; Tetsuhiro Tanabe; Hidemi Takasu; H. Amaike; T. Onuma; Shigefusa F. Chichibu; Atsushi Tsukazaki; Akira Ohtomo; M. Kawasaki

We have grown nitrogen-doped MgxZn1−xO:N films on Zn-polar ZnO single crystal substrates by molecular beam epitaxy. As N-sources, we employed NO-plasma or NH3 gas itself. As x increased, optimum growth temperature window for smooth film morphology shifted to higher temperatures, while maintaining high N-concentration (∼1×1019u2002cm−3). The heterosructures of MgxZn1−xO:N (0.1≤x≤0.4)/ZnO were fabricated into light emitting diodes of 500-μm-diameter. We observed ultraviolet near-band-edge emission (λ∼382u2002nm) with an output power of 0.1u2002μW for a NO-plasma-doped LED and 70u2002μW for a NH3-doped one at a bias current of 30 mA.


Semiconductor Science and Technology | 2005

Exciton-polariton spectra and limiting factors for the room-temperature photoluminescence efficiency in ZnO

Shigefusa F. Chichibu; Akira Uedono; Atsushi Tsukazaki; T. Onuma; M Zamfirescu; Akira Ohtomo; A. V. Kavokin; G. Cantwell; C. W. Litton; Takayuki Sota; Masashi Kawasaki

Static and dynamic responses of excitons in state-of-the-art bulk and epitaxial ZnO are reviewed to support the possible realization of polariton lasers, which are coherent and monochromatic light sources due to Bose condensation of exciton–polaritons in semiconductor microcavities (MCs). To grasp the current problems and to pave the way for obtaining ZnO epilayers of improved quality, the following four principal subjects are treated: (i) polarized optical reflectance (OR), photoreflectance (PR) and photoluminescence (PL) spectra of the bulk and epitaxial ZnO were recorded at 8 K. Energies of PR resonances corresponded to those of upper and lower exciton–polariton branches, where A-, B- and C-excitons couple simultaneously to an electromagnetic wave. PL peaks due to the corresponding polariton branches were observed. Longitudinal–transverse splittings (ωLT) of the corresponding excitons were 1.5, 11.1 and 13.1 meV, respectively. The latter two values are more than two orders of magnitude greater than that of GaAs being 0.08 meV. (ii) Using these values and material parameters, corresponding vacuum-field Rabi splitting of exciton–polaritons coupled to a model MC mode was calculated to be 191 meV, which is the highest value ever reported for semiconductor MCs and satisfies the requirements to observe the strong exciton–light coupling regime necessary for polariton lasing above room temperature. (iii) Polarized OR and PR spectra of an out-plane nonpolar ZnO epilayer grown by laser-assisted molecular beam epitaxy (L-MBE) were measured, since ZnO quantum wells (QWs) grown in nonpolar orientations are expected to show higher emission efficiencies due to the elimination of spontaneous and piezoelectric polarization fields normal to the QW plane. They exhibited in-plane anisotropic exciton resonances according to the polarization selection rules for anisotropically-strained wurzite material. (iv) Impacts of point defects on the nonradiative processes in L-MBE ZnO were studied using time-resolved PL making a connection with the results of positron annihilation measurement. Free excitonic PL intensity at room temperature naturally increased with the increase in nonradiative lifetime (τnr). The value of τnr increased and density or size of Zn vacancies (VZn) decreased with increasing growth temperature (Tg) in heteroepitaxial films grown on a ScAlMgO4 substrate, and the use of homoepitaxial substrates further reduced VZn density. The value of τnr was shown to increase with the decrease in gross density of positively and negatively charged and neutral point defects including complexes rather than with the decrease in VZn density. The results indicate that the nonradiative recombination process is governed not by single point defects, but by certain defects introduced with the incorporation of VZn, such as VZn-defect complexes. As a result of defect elimination by growing the films at high Tg followed by subsequent post-growth in situ annealing, combined with the use of high-temperature-annealed ZnO self-buffer layer, a record long τnr for spontaneous emission of 3.8 ns was obtained at room temperature. By using progressively improving epitaxial growth methods, the polariton laser effect is expected to be observed at room temperature in the near future.


Journal of Applied Physics | 2009

Free and bound exciton fine structures in AlN epilayers grown by low-pressure metalorganic vapor phase epitaxy

T. Onuma; Tomohiko Shibata; Kei Kosaka; K. Asai; Shigeaki Sumiya; Mitsuhiro Tanaka; Takayuki Sota; Akira Uedono; Shigefusa F. Chichibu

Exciton fine structures were observed in partially polarized optical reflectance and cathodoluminescence (CL) spectra of AlN epilayers grown by low-pressure metalorganic vapor phase epitaxy on (0001) Al2O3 substrates. A few free and four bound exciton lines were clearly resolved in the low-temperature CL spectra of the lowest threading dislocation density (∼1×108u2002cm−2) AlN film. From the energy difference between the ground-state and the first excited states, the hydrogenic A-exciton binding energy in the present compressively strained (Δa/a≈−1.68%) AlN was estimated to be approximately 51 meV.


Applied Physics Express | 2008

Plasma-assisted Molecular Beam Epitaxy of High Optical Quality MgZnO Films on Zn-polar ZnO Substrates

Yoshio Nishimoto; Ken Nakahara; Daiju Takamizu; Atsushi Sasaki; Kentaro Tamura; Shunsuke Akasaka; Hiroyuki Yuji; Tetsuo Fujii; Tetsuhiro Tanabe; Hidemi Takasu; Atsushi Tsukazaki; Akira Ohtomo; T. Onuma; Shigefusa F. Chichibu; Masashi Kawasaki

The excellent structural and optical properties of pseudomorphic MgxZn1-xO films (0≤x≤0.39) are reported in this work. The MgxZn1-xO films were grown on Zn-polar ZnO substrates by plasma-assisted molecular beam epitaxy. Those MgxZn1-xO films for which x≤0.18 exhibited atomically flat surfaces, and the typical full-width-at-half-maximum (FWHM) value of the (0002) X-ray diffraction ω-rocking curves for these films was 35 arcsec. The FWHM values were less than 100 meV for the near-band-edge photoluminescence (PL) at 300 K. We observed PL lifetimes of the order of ns, and the longest fast-decay component reached 3.5 ns for the Mg0.12Zn0.88O alloy.


Journal of Applied Physics | 2008

Direct correlation between the internal quantum efficiency and photoluminescence lifetime in undoped ZnO epilayers grown on Zn-polar ZnO substrates by plasma-assisted molecular beam epitaxy

Daiju Takamizu; Yoshio Nishimoto; Shunsuke Akasaka; Hiroyuki Yuji; Kentaro Tamura; Ken Nakahara; T. Onuma; Tetsuhiro Tanabe; Hidemi Takasu; Masashi Kawasaki; Shigefusa F. Chichibu

The equivalent internal quantum efficiency (ηinteq) at 300K of the near-band-edge excitonic photoluminescence (PL) peak in ZnO epilayers grown by plasma-assisted molecular beam epitaxy on Zn-polar ZnO substrates was directly correlated with the PL lifetime (τPL) for the first time. This relation seems to be universal for O-polar ZnO films grown by other methods. Present homoepitaxial ZnO epilayers grown above 800°C exhibited atomically flat surfaces, and the best full-width-at-half-maximum value of (0002) ZnO x-ray diffraction ω-rocking curves was 17.6arcsec. The high-temperature growth also led to a long τPL of 1.2ns at 300K. As a result, a record high ηinteq value (9.6%) was eventually obtained under an excitation density of 5W∕cm2 (He–Cd, 325.0nm). The homoepitaxial Zn-polar ZnO films grown by molecular beam epitaxy are coming to be used for p-n junction devices.


Journal of Applied Physics | 2007

Impact of strain on free-exciton resonance energies in wurtzite AlN

Hirokatsu Ikeda; Takahiro Okamura; Kodai Matsukawa; Takayuki Sota; Mariko Sugawara; Takuya Hoshi; P. Cantu; Rajat Sharma; John F. Kaeding; S. Keller; Umesh K. Mishra; Kei Kosaka; Keiichiro Asai; Shigeaki Sumiya; Tomohiko Shibata; Mitsuhiro Tanaka; James S. Speck; Steven P. DenBaars; Shuji Nakamura; T. Koyama; T. Onuma; Shigefusa F. Chichibu

The strain dependence of the free-exciton resonance energies in AlN epilayers is presented and the values are analyzed using an appropriate Hamiltonian assuming equibiaxial stress for the wurtzite crystal structure in order to obtain valence band parameters. Based on the results, we study the strain dependence of the valence band ordering, optical transition probability, and free-exciton binding energy. As a result of these calculations, the following strain-free values are obtained for the energy gap, averaged dielectric constants, and ordinary and extraordinary dielectric constants: Eg=6.095u2002eV at T=11u2002K, ϵ=7.87, ϵ⊥=7.33, and ϵ∥=8.45, respectively. A brief discussion of the valence band ordering in bulk AlxGa1−xN is also presented.


Applied Physics Letters | 2008

Microstructural evolution in m-plane GaN growth on m-plane SiC

Qian Sun; Soon-Yong Kwon; Z. Ren; Jung Han; T. Onuma; Shigefusa F. Chichibu; Shaoping Wang

This letter presents a study on the nucleation and microstructural evolution of m-plane GaN epilayers on m-plane SiC substrates using high-temperature AlN buffer layers. Controlled growth interruptions were carried out to render snapshots of heteroepitaxial dynamics. It was discovered that island coalescence results in an inhomogeneous mosaic tilt along the c-axis. Mesoscopic study of nucleation evolution helps elucidate the origin of commonly observed surface undulation and striation, which is attributed to concave growth due to the coalescence of trapezoidal islands upon contact. A model correlating microstructural defects with optical properties is proposed to explain the observed pattern in spatially resolved cathodoluminescence mapping.


Applied Physics Letters | 2010

Major impacts of point defects and impurities on the carrier recombination dynamics in AlN

Shigefusa F. Chichibu; T. Onuma; K. Hazu; Akira Uedono

Impacts of point defects and impurities on the carrier recombination dynamics in AlN are revealed by time-resolved spectroscopy and positron annihilation measurements. Intrinsically short low-temperature excitonic radiative lifetime (τR∼10u2002ps) was elongated with the increase in Al-vacancy concentration up to 530 ps, irrespective of threading dislocation density. A continuous decrease in τR with temperature rise up to 200 K for heavily doped samples revealed the carrier release from the band-tail formed due to impurities and point defects. Because room-temperature nonradiative lifetime was equally short for all samples, high temperature growth with appropriate defect management is necessary in extracting radiative nature of AlN.


Applied Physics Letters | 2008

Anisotropic optical gain in m-plane InxGa1−xN/GaN multiple quantum well laser diode wafers fabricated on the low defect density freestanding GaN substrates

T. Onuma; Kuniyoshi Okamoto; Hiroaki Ohta; Shigefusa F. Chichibu

The threshold power density for the stimulated emission (SE) at 400 nm of m-plane In0.05Ga0.95N/GaN multiple quantum well (QW) laser diode (LD) wafer excited with a stripe along the c-axis was found to be lower than along the a-axis, although the SEs exhibited transverse electric field mode for both configurations. The result was explained according to the polarization selection rules for the lowest and the second lowest energy interband transitions in anisotropically strained m-plane InGaN QWs. In case of the LD wafer lased at 426 nm, SE was observed only along the c-axis, where pronounced broadening of the gain spectrum was found. Because the equivalent internal quantum efficiency was only 44%, further reductions in nonradiative defect density and the width of gain spectrum are essential to realize longer wavelength LDs.


Journal of Vacuum Science & Technology B | 2007

Radiative and nonradiative lifetimes in nonpolar m-plane InxGa1−xN∕GaN multiple quantum wells grown on GaN templates prepared by lateral epitaxial overgrowth

T. Onuma; T. Koyama; A. Chakraborty; M. McLaurin; B. A. Haskell; P. T. Fini; S. Keller; S. P. DenBaars; James S. Speck; Shuji Nakamura; Umesh K. Mishra; Takayuki Sota; S. F. Chichibu

Different from the case for polar (0001) InxGa1−xN multiple quantum wells (MQWs), the effective radiative lifetimes (τR,eff) at 8K of violet (V: 3.15eV), purple (P: 3.00eV), and blue (B: 2.83eV) emission peaks in nonpolar (11¯00) InxGa1−xN∕GaN MQWs fabricated on various GaN templates were found to be nearly independent of InN molar fraction x being approximately 1ns. The result indicates the absence of polarization fields parallel to the MQW normal. For each luminescence peak, the effective nonradiative lifetime (τNR,eff) at room temperature of the MQWs grown on “Ga-polar” wings of the GaN template prepared by lateral epitaxial overgrowth (LEO) was longer than that for the MQWs grown on “N-polar” wings, windows, or on conventional GaN templates, which had high density basal plane stacking faults and threading dislocations. Since τR,eff was little affected by the presence of defects, the increase in τNR,eff brought fivefold improvement in the equivalent internal quantum efficiency (ηinteq) of V peak. Becau...

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Akira Uedono

Applied Science Private University

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Shuji Nakamura

University of California

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Akira Ohtomo

Tokyo Institute of Technology

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