Tae K. Won
Applied Materials
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Publication
Featured researches published by Tae K. Won.
SID Symposium Digest of Technical Papers | 2008
Ya-Tang Yang; Beom Soo Park; Tae K. Won; Soo Young Choi; John M. White
Replacing the current non-alkali glass with soda lime glass can significantly reduce the cost of the current TFT-LCD module. One key step in manufacturing is to make TFT backplane on soda lime glass substrate. In this work, we demonstrate low temperature a- Si thin film transistor (TFT) at 200°C on soda lime glass. with the use of SiNx barrier to prevent sodium contamination, we show the TFT properties can be improved significantly and achieve TFT of saturation mobility 0.47cm2/Vs, threshold voltage 0V, off current 77×10−11 A, sub-threshold swing 1.0 V/dec. We also show that our TFT device has comparable or better threshold voltage stability as compared to those made in non-alkali glass. Finally, we show the robustness of SiNx barrier against long term sodium migration.
Archive | 2008
Robert Z. Bachrach; Yong-Kee Chae; Soo Young Choi; Nicholas de Vries; Yacov Elgar; Eric A. Englhardt; Michel Frei; Parris Hawkins; Choi Ho; James Craig Hunter; Penchala N. Kankanala; Liwei Li; Wing Hoo Lo; Danny Cam Toan Lu; Fang Mei; Stephen P. Murphy; Srujal Patel; Matthew J. B. Saunders; Asaf Schlezinger; Shuran Sheng; Tzay-Fa Su; Jeffrey S. Sullivan; David Tanner; Teresa Trowbridge; Brice Walker; John M. White; Tae K. Won
Archive | 2008
Robert Z. Bachrach; Yong-Kee Chae; Soo Young Choi; Nicholas de Vries; Yacov Elgar; Eric A. Englhardt; Michel Frei; Parris Hawkins; Choi Ho; James Craig Hunter; Penchala N. Kankanala; Liwei Li; Wing Hoo Lo; Danny Cam Toan Lu; Fang Mei; Stephen P. Murphy; Srujal Patel; Matthew J. B. Saunders; Asaf Schlezinger; Shuran Sheng; Tzay-Fa Su; Jeffrey S. Sullivan; David Tanner; Teresa Trowbridge; Brice Walker; John M. White; Tae K. Won
Archive | 2010
Ya-Tang Yang; Beom Soo Park; Tae K. Won; Soo Young Choi
Archive | 2014
Tae K. Won; Soo Young Choi; Dong-Kil Yim; Beom Soo Park
Archive | 2014
Tae K. Won; Soo Young Choi; Dong-Kil Yim; Beom Soo Park
Archive | 2013
Jrjyan Jerry Chen; Tae K. Won; Beom Soo Park; Young Jin Choi; Soo Young Choi
Semiconductor international 日本版 | 2008
Yong-Kee Chae; Tae K. Won; Liwei Li
Archive | 2008
Ya-Tang Yang; Beom Soo Park; Tae K. Won; Soo Young Choi; John M. White
Archive | 2008
Robert Z. Bachrach; Yong-Kee Chae; Soo Young Choi; Vries Nicholas G. J. De; Yacov Elgar; Eric A. Englhardt; Michel Frei; Parris Hawkins; Choi Ho; James Craig Hunter; Penchala N. Kankanala; Liwei Li; Wing Hoo Lo; Danny Cam Toan Lu; Fang Mei; Stephen P. Murphy; Srujal Patel; Matthew J. B. Saunders; Asaf Schlezinger; Shuran Sheng; Tzay-Fa Su; Jeffrey S. Sullivan; David Tanner; Teresa Trowbridge; Brice Walker; John M. White; Tae K. Won
